Title
A 0.53pJK27000μm2resistor-based temperature sensor with an inaccuracy of ±0.35°C (3σ) in 65nm CMOS
Author
Choi, Woojun (Yonsei University)
Lee, Yong-Tae (Yonsei University)
Kim, Seonhong (SK Hynix)
Lee, Sanghoon (SK Hynix)
Jang, Jieun (SK Hynix)
Chun, Junhyun (SK Hynix)
Makinwa, K.A.A. (TU Delft Microelectronics) 
Chae, Youngcheol (Yonsei University)
Contributor
Fujino, L.C. (editor)
Department
Microelectronics
Date
2018
Abstract
In microprocessors and DRAMs, on-chip temperature sensors are essential components, ensuring reliability by monitoring thermal gradients and hot spots. Such sensors must be as small as possible, since multiple sensors are required for dense thermal monitoring. However, conventional BJT-based temperature sensors are not compatible with the sub-1V supply of advanced processes. Subthreshold MOSFETs can operate from lower supplies, but at high temperatures their performance is limited by leakage [1,2]. Thermal diffusivity (TD) sensors achieve sub-1V operation and small area with moderate accuracy, but require milliwatts of power [3]. Recently, resistor-based sensors based on RC WienBridge (WB) filters have realized high resolution and energy efficiency [4,5]. Fundamentally, they are robust to process and supply-voltage scaling. However, their readout circuitry has been based on continuous-time (CT) ΔΣ ADCs or frequency-locked loops (FLLs), which require precision analog circuits and occupy considerable area (>0.7mm 2 ).
Subject
Temperature sensors
Frequency locked loops
Temperature measurement
Jitter
Phase frequency detector
To reference this document use:
http://resolver.tudelft.nl/uuid:0bd07d4e-5c9b-46b4-bb45-2852b20ebe8b
DOI
https://doi.org/10.1109/ISSCC.2018.8310314
Publisher
IEEE, Piscataway, NJ
Embargo date
2022-03-30
ISBN
978-1-5386-2227-8
Source
2018 IEEE International Solid-State Circuits Conference, ISSCC 2018: Digest of Technical Papers, 61
Event
65th IEEE International Solid-State Circuits Conference, ISSCC 2018, 2018-02-11 → 2018-02-15, San Francisco, United States
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2018 Woojun Choi, Yong-Tae Lee, Seonhong Kim, Sanghoon Lee, Jieun Jang, Junhyun Chun, K.A.A. Makinwa, Youngcheol Chae