Designing a 100 [aF/nm] capacitive transducer

Conference paper (2018)

Authors

L.M. Middelburg Electronic Components, Technology and Materials -

B. el Mansouri Electronic Components, Technology and Materials -

René H. Poelma Electronic Components, Technology and Materials -

H.W. van Zeijl Electronic Components, Technology and Materials -

J. Wei EKL Processing -

Kouchi Zhang Electronic Components, Technology and Materials -

W.D. van Driel Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

DOI: https://doi.org/10.1109/EuroSimE.2018.8369954

Mathematical model Sensitivity Electrodes Substrates Fingers Mechanical sensors

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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure 1. Maximizing the capacitive sensitivity, results in suppression of noise in the electronics domain. This work focuses on the design and realization of a mechanical to electrical transduction using a capacitive readout scheme. Design considerations and measures are taken to maximize the latter are considered and illustrated using FEM simulations. A capacitive transducer showing a sensitivity of 100 [aF/nm] was designed and realized, by exploiting the large displacement behavior of the inertial sensor which was considered.

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