Print Email Facebook Twitter Characterization of a photonic strain sensor in silicon-on-insulator technology Title Characterization of a photonic strain sensor in silicon-on-insulator technology Author Westerveld, W.J. Pozo, J. Harmsma, P.J. Schmits, R. Tabak, E. Van den Dool, T.C. Leinders, S.M. Van Dongen, K.W.A. Urbach, H.P. Yousefi, M. Faculty Applied Sciences Date 2012-02-06 Abstract Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE6619, 661914 (2007)PSISDG0277-786X10.1117/12.738412] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge. However, the strong lateral confinement of the light in SOI waveguides and its corresponding modal dispersion where not taken into account. We present a theoretical understanding, as well as experimental results, of strain applied on waveguide-based microresonators, and find that the following effects play important roles: elongation of the racetrack length, modal dispersion of the waveguide, and the strain-induced change in effective refractive index. Subject experimental physicsacousto-optical materialssemiconductor materialsoptical sensing and sensorswavelength filtering devicesoptomechanics To reference this document use: http://resolver.tudelft.nl/uuid:b0f24e87-b409-45f0-8668-7c23ddcfd0c2 DOI https://doi.org/10.1364/OL.37.000479 Publisher Optical Society of America ISSN 0146-9592 Source http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-4-479 Source Optics Letters, 37 (4), 2012 Part of collection Institutional Repository Document type journal article Rights (c) 2012 Optical Society of America Files PDF Westerveld.pdf 230.33 KB Close viewer /islandora/object/uuid:b0f24e87-b409-45f0-8668-7c23ddcfd0c2/datastream/OBJ/view