Print Email Facebook Twitter An UV linear variable optical filter-based micro-spectrometer Title An UV linear variable optical filter-based micro-spectrometer Author Emadi, A. Wu, H. De Graaf, G. Hedsten, K. Enoksson, P. Correia, J.H. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2010-12-31 Abstract This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm–400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the LVOF, shows high linearity of the profile. It is expected that using signal processing, spectral resolution better than 0.5 nm can be achieved with this UV LVOF. The filter provides the possibility to have a robust high-resolution micro-spectrometer in the UV on a CMOS chip. Subject linear variable filtermicro-spectrometerultra-violetUVon-chip To reference this document use: http://resolver.tudelft.nl/uuid:b52e0d0e-2cc5-4a27-81ff-3f6555da2f7e DOI https://doi.org/10.1016/j.proeng.2010.09.135 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 5, 2010 Part of collection Institutional Repository Document type journal article Rights (c) 2010 Elsevier Files PDF Emadi_2010.pdf 702.27 KB Close viewer /islandora/object/uuid:b52e0d0e-2cc5-4a27-81ff-3f6555da2f7e/datastream/OBJ/view