Print Email Facebook Twitter Fiber-coupled displacement interferometry without periodic nonlinearity Title Fiber-coupled displacement interferometry without periodic nonlinearity Author Ellis, J.D. Meskers, A.J.H. Spronck, J.W. Munnig Schmidt, R.H. Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Date 2011-09-12 Abstract Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinearity in both free-space and fiber-delivered variants. Subject instrumentation, measurement and metrologyfringe analysisinterferometrymetrological instrumentationoptical design of instrumentsoptical systems To reference this document use: http://resolver.tudelft.nl/uuid:ce6afd90-098f-4f30-9a50-41e811923719 DOI https://doi.org/10.1364/OL.36.003584 Publisher Optical Society of America ISSN 0146-9592 Source http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-18-3584 Source Optics Letters, 36 (18), 2011 Part of collection Institutional Repository Document type journal article Rights © 2011 Optical Society of America Files PDF Ellis_2011.pdf 786.48 KB Close viewer /islandora/object/uuid:ce6afd90-098f-4f30-9a50-41e811923719/datastream/OBJ/view