In-package MEMS-based thermal actuators for micro-assembly

Silicon micromachining of high aspect ratio, high-density through-wafer electrical interconnects for 3-D multichip packaging

Evaluation of an Empirical Model to Estimate and Optimize Mechanical Properties of PECVD SiC Films

Polarization-insensitive PECVD SiC waveguides for photonic sensing

Microfluidic device for carrying out a reaction

Spray coating of photoresist for pattern transfer on high topography surfaces

Microelectronics: A macro world

Silicon micro-optics for smart light control

Filter-protected photodiodes for high-throughput enzymatic analysis

Photoresist coating methods for the integration of novel 3-D RF microstructures

M3: The third dimension of silicon

Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus

Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers

IC-compatible two-level bulk micromachining process module for RF silicon technology

Thin photodiodes for a neutron scintillator silicon-well detector

Microarrays for biotechnology: The imaging challenge

Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells

X-ray detection with multi-anode sawtooth silicon drift detectors

Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250 µm

Diminished electron cloud broadening in a silicon drift detector by sawtooth p+ strips