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Gkouzou, A. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...journal article 2020
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Kwok, Kam Sang (author), Huang, Qi (author), Mastrangeli, Massimo (author), Gracias, David (author)Self-folding broadly refers to the assembly of 3D structures by bending, curving, and folding without the need for manual or mechanized intervention. Self-folding is scientifically interesting because examples of self-folded structures, from plant leaves to gut villi to cerebral gyri, abound in nature. From an engineering and technological...review 2019
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Quiros Solano, W.F. (author)Drug development is a complex, time-consuming (10 - 15 years) and expensive process. For a new medicine to reach the market, the net expenses covered by the pharmaceutical industry have been estimated to be around $2.6 billion. Nevertheless, the risk of finding adverse effects or toxicity cases once the drug is already on the market is still...doctoral thesis 2019
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Oliveira Alves, A.C. (author), Schut, T. V.P. (author), Groenesteijn, J. (author), Fan, Q. (author), Wiegerink, R. J. (author), Makinwa, K.A.A. (author)This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low...conference paper 2019
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Zhang, B. (author), Wei, J. (author), Bottger, A.J. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas...conference paper 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
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Mountain, Christopher (author), Kluba, M.M. (author), Bergers, L.I.J.C. (author), Snijder, Jaap (author), Dekker, R. (author)Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer surface is essential to advanced MEMS production. Existing alignment methods are well defined, but often require specialized equipment or costly software packages available only in professional manufacturing environments. It would be beneficial...journal article 2019
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Farhadi Machekposhti, D. (author)Classical human-engineered transmission mechanisms such as linkages, gears, and couplings are well established designs which made out of multiple parts and rigid hinges. However, these mechanisms impose disadvantages such as wear, friction, low precision and reliability, need for assembly and lubrications, and difficulty for miniaturization. By...doctoral thesis 2018
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), Cervone, A. (author), Gill, E.K.A. (author)CubeSats have been extensively used in the past decade as scientific tools, technology demonstrators and for education. Recently, PocketQubes have emerged as an interesting and even smaller alternative to CubeSats. However, both satellite types often lack some key capabilities, such as micropropulsion, in order to further extend the range of...review 2018
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Savov, A.M. (author), Joshi, S. (author), Shafqat, Salman (author), Hoefnagels, Johan (author), Louwerse, M.C. (author), Stoute, R. (author), Dekker, R. (author)A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and...journal article 2018
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Wu, K. (author), Tichem, M. (author)Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products. In the pursuit of a fully-automated, high-precision, and cost-effective photonic alignment scheme for two multi-channel photonic chips, this paper explores...journal article 2018
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), van Zeijl, H.W. (author), Cervone, A. (author), Gill, E.K.A. (author)This paper presents the results of design, manufacturing and characterization of Vaporizing Liquid Microthrusters (VLM) with integrated molybdenum heaters and temperature sensing. The thrusters use water as the propellant and are designed for use in CubeSats and PocketQubes. The devices are manufactured using silicon based MEMS (Micro Electro...journal article 2017
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Basak, S. (author)With the focus in automobile industry to switch from petroleum-based vehicles to all electric vehicles, the increasing demand on harvesting energy from renewable sources for a safer and greener future and the ever-increasing demand of the portable electronics systems, the need for better batteries is eminent. The ultimate aim of battery research...doctoral thesis 2017
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Sajadi, B. (author), Alijani, F. (author), Goosen, J.F.L. (author), van Keulen, A. (author)Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order...journal article 2017
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Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author), Poelma, René H. (author)In this work a method is described to investigate process variations across a wafer. Through wafer MEMS spiral resonators were designed, simulated, fabricated and characterized by measuring the eigenfrequency and corresponding mode shapes. Measuring the eigenfrequency and resulting spectral behavior of resonators on different locations on the...conference paper 2017
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), Cervone, A. (author)This paper presents a dynamic system approach for the modeling of fluid flow in microchannels to be used in thrust control applications. A micro-resistojet fabricated using MEMS (Microelectromechanical Systems) technology has been selected for the analysis. The device operates by vaporizing a liquid propellant, in this case water, and expelling...conference paper 2016
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Wörhoff, Kerstin (author), Prak, Albert (author), Postma, F. (author), Leinse, A (author), Wu, K. (author), Peters, T.J. (author), Tichem, M. (author), Amaning-Appiah, B. (author), Renukappa, V. (author), Vollrath, G. (author), Balcells-Ventura, J. (author), Uhlig, P. (author), Seyfried, M. (author), Rose, D. (author), Santos, Raquel (author), Leijtens, XJM (author), Flintham, B. (author), Wale, M. (author), Robbins, D. (author)Fully automated, high precision, cost-effective assembly technology for photonic packages remains one of the main challenges in photonic component manufacturing. Next to the cost aspect the most demanding assembly task for multiport photonic integrated circuits (PICs) is the high-precision (±0.1 μm) alignment and fixing required for optical I...conference paper 2016
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Peters, T.J. (author), Tichem, M. (author)This paper reports on the progress related to a multichannel photonic alignment concept, aiming for sub-micrometer precision in the alignment of the waveguides of two photonic integrated circuits (PICs). The concept consists of two steps: chip-to-chip positioning and chip bonding provide a coarse alignment after which waveguide-to-waveguide...conference paper 2016
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de Laat, M.L.C. (author), Perez Garza, H.H. (author), Herder, J.L. (author), Ghatkesar, M.K. (author)In situ stiffness adjustment in microelectromechanical systems is used in a variety of applications such as radio-frequency mechanical filters, energy harvesters, atomic force microscopy, vibration detection sensors. In this review we provide designers with an overview of existing stiffness adjustment methods, their working principle, and...journal article 2016
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Buja, F. (author)This thesis aims to provide the latest progresses on the experimental investigation of friction and adhesion phenomena, occurring at the nanoscale in microelectromechanical systems (MEMS). I have studied and characterized the interaction between MEMS sidewalls in contact and sliding one onto another. Ultrananocrystalline diamond (UNCD) and...doctoral thesis 2015