- Formation and growth of silicon nitride particles in a laser-driven aerosol reactor investigated with photon correlation spectroscopy and electron microscopy
- Raman spectroscopy as an on-line measurement technique in a laser-CVD reactor during production of Si sub 3N sub 4
- Thermodynamic Calculations on the Chemical Vapor-Deposition of Silicon-Nitride and Silicon from Silane and Chlorinated Silanes