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Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films

Hagendoorn, Y. (author), Pandraud, G. (author), Vollebregt, S. (author), Morana, B. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author)

Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...

journal article 2022

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Design and fabrication of networks for bacterial computing

Van Delft, Falco C.M.J.M. (author), Sudalaiyadum Perumal, Ayyappasamy (author), van Langen-Suurling, A.K. (author), de Boer, C.R. (author), Kašpar, Ondřej (author), Tokárová, Viola (author), Dirne, F. (author), Nicolau, Dan V. (author)

Non-deterministic polynomial (NP-) complete problems, whose number of possible solutions grows exponentially with the number of variables, require by necessity massively parallel computation. Because sequential computers, such as solid state-based ones, can solve only small instances of these problems within a reasonable time frame, parallel...

journal article 2021

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Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

Glessi, Cristiano (author), Mahgoub, A.M.I.M. (author), Hagen, C.W. (author), Tilset, Mats (author)

Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or...

journal article 2021

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Integrated photonics multi-waveguide devices for optical trapping and Raman spectroscopy: design, fabrication and performance demonstration

Loozen, G.B. (author), Karuna, A. (author), Rafiee Fanood, M.M. (author), Schreuder, Erik (author), Caro-Schuurman, J. (author)

We realized integrated photonics multi-waveguide devices for optical trapping and Raman spectroscopy of particles in a fluid. In these devices, multiple beams directed towards the device center lead to a local field enhancement around this center and thus counteract the effect of light concentration near the facets, which is a disadvantage of...

journal article 2020

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Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

Mahgoub, A.M.I.M. (author), Lu, Hang (author), Thorman, Rachel M. (author), Preradovic, Konstantin (author), Jurca, Titel (author), McElwee-White, Lisa (author), Fairbrother, Howard (author), Hagen, C.W. (author)

Two platinum precursors, Pt(CO)₂Cl₂ and Pt(CO)₂Br₂, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments...

journal article 2020

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Nanofabricated tips for device-based scanning tunneling microscopy

Leeuwenhoek, M. (author), Norte, R.A. (author), Bastiaans, Koen M. (author), Cho, Doohee (author), Battisti, Irene (author), Blanter, Y.M. (author), Groeblacher, S. (author), Allan, Milan P. (author)

We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire...

journal article 2019

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Electrochemical Amplification in Side-by-Side Attoliter Nanogap Transducers

Zafarani, H. (author), Mathwig, Klaus (author), Sudhölter, Ernst J. R. (author), Rassaei, L. (author)

We report a strategy for the fabrication of a new type of electrochemical nanogap transducer. These nanogap devices are based on signal amplification by redox cycling. Using two steps of electron-beam lithography, vertical gold electrodes are fabricated side by side at a 70 nm distance encompassing a 20 attoliter open nanogap volume. We...

journal article 2017

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Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition

Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)

To demonstrate the possibility of using electron beam-induced deposition (EBID) masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20- to 40-nm EBID masks, which were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine, and boron trichloride...

journal article 2015

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Thermal conductivity of low temperature grown vertical carbon nanotube bundles measured using the three-? method

Vollebregt, S. (author), Banerjee, S. (author), Beenakker, K. (author), Ishihara, R. (author)

The thermal conductivity of as-grown vertical multi-walled carbon nanotubes (CNT) bundles fabricated at low temperature (500?°C) was measured using a vertical 3?-method. For this, CNT were selectively grown inside an oxide opening and sandwiched between two metal electrodes. The validity of the method was confirmed by both measurements as...

journal article 2013

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Ultrahigh throughput plasma processing of free standing silicon nanocrystals with lognormal size distribution

Dogan, I. (author), Kramer, N.J. (author), Westermann, R.H.J. (author), Dohnalova, K. (author), Smets, A.H.M. (author), Verheijen, M.A. (author), Greogorkiewicz, T. (author), Van de Sanden, M.C.M. (author)

We demonstrate a method for synthesizing free standing silicon nanocrystals in an argon/silane gas mixture by using a remote expanding thermal plasma. Transmission electron microscopy and Raman spectroscopy measurements reveal that the distribution has a bimodal shape consisting of two distinct groups of small and large silicon nanocrystals with...

journal article 2013

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Tip-based chemical vapor deposition with a scanning nano-heater

Gaitas, A. (author)

In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublimated copper acetylacetonate (Cu(acac)2), argon (Ar...

journal article 2013

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Top-down fabrication of plasmonic nanostructures for deterministic coupling to single quantum emitters

Pfaff, W. (author), Vos, A. (author), Hanson, R. (author)

Metal nanostructures can be used to harvest and guide the emission of single photon emitters on-chip via surface plasmon polaritons. In order to develop and characterize photonic devices based on emitter-plasmon hybrid structures, a deterministic and scalable fabrication method for such structures is desirable. Here, we demonstrate deterministic...

journal article 2013

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Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)

TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...

journal article 2012

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Current-induced nanogap formation and graphitization in boron-doped diamond films

Seshan, V. (author), Arroyo, C.R. (author), Castellanos-Gomez, A. (author), Prins, F. (author), Perrin, M.L. (author), Janssens, S.D. (author), Haenen, K. (author), Nesládek, M. (author), Sudhölter, E.J.R. (author), De Smet, L.C.P.M. (author), Van der Zant, H.S.J. (author), Dulic, D. (author)

A high-current annealing technique is used to fabricate nanogaps and hybrid diamond/graphite structures in boron-doped nanocrystalline diamond films. Nanometer-sized gaps down to ?1?nm are produced using a feedback-controlled current annealing procedure. The nanogaps are characterized using scanning electron microscopy and electronic transport...

journal article 2012

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Oxidation kinetics of nanoscale copper films studied by terahertz transmission spectroscopy

Ramanandan, G.K.P. (author), Ramakrishnan, G. (author), Planken, P.C.M. (author)

Terahertz (THz) transmission spectroscopy is used to measure the oxidation kinetics of copper thin films evaporated on silicon substrates. The transmission of broadband THz pulses from 1 to 7 THz through the copper film is measured while it gets oxidized at an elevated temperature in ambient air. The change in the transmitted THz electric field...

journal article 2012

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Position-controlled [100] InP nanowire arrays

Wang, J. (author), Plissard, S. (author), Hocevar, M. (author), Vu, T.T.T. (author), Zehender, T. (author), Immink, G.G.W. (author), Verheijen, M.A. (author), Haverkort, J. (author), Bakkers, E.P.A.M. (author)

We investigate the growth of vertically standing [100] zincblende InP nanowire (NW) arrays on InP (100) substrates in the vapor-liquid-solid growth mode using low-pressure metal-organic vapor-phase epitaxy. Precise positioning of these NWs is demonstrated by electron beam lithography. The vertical NW yield can be controlled by different...

journal article 2012

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Pulsed helium ion beam induced deposition: A means to high growth rates

Alkemade, P.F.A. (author), Miro, H. (author), Van Veldhoven, E. (author), Maas, D.J. (author), Smith, D.A. (author), Rack, P.D. (author)

The sub-nanometer beam of a helium ion microscope was used to study and optimize helium-ion beam induced deposition of PtC nanopillars with the (CH3)3Pt(CPCH3) precursor. The beam current, beam dwell time, precursor refresh time, and beam focus have been independently varied. Continuous beam exposure resulted in narrow but short pillars, while...

journal article 2011

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Deterministic nanoassembly of a coupled quantum emitter–photonic crystal cavity system

Van der Sar, T. (author), Hagemeier, J. (author), Pfaff, W. (author), Heeres, E.C. (author), Thon, S.M. (author), Kim, H. (author), Petroff, P.M. (author), Oosterkamp, T.H. (author), Bouwmeester, D. (author), Hanson, R. (author)

Controlling the interaction of a single quantum emitter with its environment is a key challenge in quantum optics. Here, we demonstrate deterministic coupling of single nitrogen-vacancy (NV) centers to high-quality photonic crystal cavities. We preselect single NV centers and position their 50-nm-sized host nanocrystals into the mode maximum of...

journal article 2011

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Position controlled nanowires for infrared single photon emission

Dorenbos, S.N. (author), Sasakura, H. (author), Van Kouwen, M.P. (author), Akopian, N. (author), Adachi, S. (author), Namekata, N. (author), Jo, M. (author), Motohisa, J. (author), Kobayashi, Y. (author), Tomioka, K. (author), Fukui, T. (author), Inoue, S. (author), Kumano, H. (author), Natarajan, C.M. (author), Hadfield, R.H. (author), Zijlstra, T. (author), Klapwijk, T.M. (author), Zwiller, V. (author), Suemune, I. (author)

We report the experimental demonstration of single-photon and cascaded photon pair emission in the infrared, originating from a single InAsP quantum dot embedded in a standing InP nanowire. A regular array of nanowires is fabricated by epitaxial growth on an electron-beam patterned substrate. Photoluminescence spectra taken on single quantum...

journal article 2010

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Positioning Pd catalyst particles for carbon nanotube growth using charge patterns created with a scanning electron microscope

Zonnevylle, A.C. (author), Hagen, C.W. (author), Kruit, P. (author), Valenti, M. (author), Schmidt-Ott, A. (author)

Positioning of charged nanoparticles with the help of charge patterns in an insulator substrate is a known method. However, the creation of charge patterns with a scanning electron microscope for this is relatively new. Here a scanning electron microscope is used for the creation of localized charge patterns in an insulator, while a glowing wire...

journal article 2009