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Prodanovic, V. (author), Chan, H.W. (author), van der Graaf, H. (author), Sarro, Pasqualina M (author)In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si <sub>x</sub> N <sub>y</sub> ) and atomic layer deposited alumina (Al<sub...journal article 2018