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Villegas, Arturo (author), Passos, M. H.M. (author), Pereira, S.F. (author), Torres, J. (author)
We show a general method to estimate with optimum precision, i.e., the best precision determined by the light-matter interaction process, a set of parameters that characterize a phase object. The method is derived from ideas presented by Pezze et al. [Phys. Rev. Lett. 119, 130504 (2017)0031-900710.1103/PhysRevLett.119.130504]. Our goal is to...
journal article 2024
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Soman, S. (author), Horsten, R.C. (author), Scholte, T.C. (author), Pereira, S.F. (author)
Inspection of surface and nanostructure imperfections play an important role in high-throughput manufacturing across various industries. This paper introduces a novel, parallelised version of the metrology and inspection technique: Coherent Fourier scatterometry (CFS). The proposed strategy employs parallelisation with multiple probes,...
journal article 2024
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Paul, A. (author), Rafigh Doost, J. (author), Dou, X. (author), Pereira, S.F. (author)
Nanostructures with steep side wall angles (swa) play a pivotal role in various technological applications. Accurate characterization of these nanostructures is crucial for optimizing their performance. In this study, we propose a far-field detection method based on coherent Fourier scatterometry (CFS) for accurate quantification of steep swa...
journal article 2024
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Paul, A. (author), Kolenov, D. (author), Scholte, T.C. (author), Pereira, S.F. (author)
Detecting defects on diffraction gratings is crucial for ensuring their performance and reliability. Practical detection of these defects poses challenges due to their subtle nature.We performnumerical investigations and demonstrate experimentally the capability of coherent Fourier scatterometry (CFS) to detect particles as small as 100 nm...
journal article 2023
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Habets, Philippe C. (author), Kalafatakis, Konstantinos (author), Dzyubachyk, O. (author), van der Werff, Steven J.A. (author), Keo, D.L. (author), Thakrar, Jamini (author), Mahfouz, A.M.E.T.A. (author), Pereira, Alberto M. (author), Russell, Georgina M. (author)
The characteristic endogenous circadian rhythm of plasma glucocorticoid concentrations is made up from an underlying ultradian pulsatile secretory pattern. Recent evidence has indicated that this ultradian cortisol pulsatility is crucial for normal emotional response in man. In this study, we investigate the anatomical transcriptional and...
journal article 2023
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Lopez Rodriguez, B. (author), van der Kolk, R.J.H. (author), Aggarwal, Samarth (author), Sharma, N. (author), Li, Z.Z.L. (author), van der Plaats, D.W. (author), Scholte, T.C. (author), Chang, J. (author), Groeblacher, S. (author), Pereira, S.F. (author), Bhaskaran, Harish (author), Esmaeil Zadeh, I.Z. (author)
Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated...
journal article 2023
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Rafigh Doost, J. (author), Kolenov, D. (author), Pereira, S.F. (author)
It has been a widely growing interest in using silicon carbide (SiC) in high-power electronic devices. Yet, SiC wafers may contain killer defects that could reduce fabrication yield and make the device fall into unexpected failures. To prevent these failures from happening, it is very important to develop inspection tools that can detect,...
journal article 2023
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Ortolano, Giuseppe (author), Paniate, Alberto (author), Boucher, Pauline (author), Napoli, Carmine (author), Soman, S. (author), Pereira, S.F. (author), Ruo-Berchera, Ivano (author), Genovese, Marco (author)
Quantum entanglement and squeezing have significantly improved phase estimation and imaging in interferometric settings beyond the classical limits. However, for a wide class of non-interferometric phase imaging/retrieval methods vastly used in the classical domain, e.g., ptychography and diffractive imaging, a demonstration of quantum...
journal article 2023
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Ubacht, J. (author), Csáki, Csaba (author), Danneels, Lieselot (author), Edelmann, Noella (author), Janssen, M.F.W.H.A. (author), Kalampokis, Evangelos (author), Lindgren, Ida (author), Novak, Anna Sophie (author), Panagiotopoulos, Panos (author), Parycek, Peter (author), Pereira, Gabriela Viale (author), Susha, I. (author), Schwabe, Gerhard (author), Virkar, Shefali (author), Tambouris, Efthimios (author), Zuiderwijk-van Eijk, A.M.G. (author)
contribution to periodical 2023
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Kolenov, D. (author), Pereira, S.F. (author)
For the development of integrated circuits, the accompanying metrology inside the fabrication process is essential. Non-imaging metrology of nanostructure has to be quick and non-destructive. The multilayers are crucial components of today's microprocessor nanostructures and reflective coatings. Coherent Fourier scatterometry (CFS), which is...
conference paper 2023
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Dou, X. (author), Zhou, Jiakang (author), Zhang, Yuquan (author), Min, Changjun (author), Pereira, S.F. (author), Yuan, Xiaocong (author)
Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian modes are characterized by a phase factor e<sup>il</sup><sup>θ</sup>, and contain a phase singularity in the middle of its beam. In the case of a transversal optical...
journal article 2023
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Yin, Haoyang (author), Kolenov, D. (author), Pereira, S.F. (author)
We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in...
journal article 2022
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Vermeulen, A.C.J. (author), Maranan, Diego (author), Steyaert, Pieter (author), Versbraegen, Nassim (author), Peeters, Ann (author), Verschuren, Jeroen (author), Wan, Arise (author), Pereira, Frederico D.A.S. (author), Faber, Nils (author), Mirzada, Fattana (author), Hespeels, Boris (author), Van Doninck, Karine (author)
Ēngines of Ēternity is a transdisciplinary project that takes the biological phenomena of cloning and DNA repair as metaphorical departure points for an art installation about humanity’s enthrallment with cultural immortality. Cultural immortality has long fascinated humankind, with such diverse examples as Ancient Egypt, the Roman Empire, Hindu...
conference paper 2022
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van Cranenburgh, S. (author), Wang, Shenhao (author), Vij, Akshay (author), Pereira, Francisco (author), Walker, Joan (author)
Since its inception, the choice modelling field has been dominated by theory-driven modelling approaches. Machine learning offers an alternative data-driven approach for modelling choice behaviour and is increasingly drawing interest in our field. Cross-pollination of machine learning models, techniques and practices could help overcome problems...
journal article 2022
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Holohan, B. Conall (author), Duarte, M. Salomé (author), Szabo Corbacho, M. (author), Cavaleiro, Ana J. (author), Salvador, Andreia F. (author), Pereira, M. Alcina (author), Ziels, Ryan M. (author), Frijters, Carla T.M.J. (author), van Lier, J.B. (author)
Several problems associated with the presence of lipids in wastewater treatment plants are usually overcome by removing them ahead of the biological treatment. However, because of their high energy content, waste lipids are interesting yet challenging pollutants in anaerobic wastewater treatment and codigestion processes. The maximal amount...
review 2022
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Echeverri, Edwan Anderson Ariza (author), Nishikawa, A.S. (author), Masoumi, Mohammad (author), Pereira, Henrique Boschetti (author), Marulanda, Nelson Granda (author), Rossy, Andrés Márquez (author), Goldenstein, Hélio (author), Tschiptschin, André Paulo (author)
A novel combined process of Cold Stamping (CS) and Hot Stamping (HS) with Quenching and Partitioning (Q&amp;P) treatment applied to advanced TRIP-assisted steel has been conducted by thermomechanical simulation to evaluate the influence of CS or HS in the Q&amp;P processing. With this purpose, Q&amp;P, CSQ&amp;P, and HSQ&amp;P cycles were...
journal article 2022
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Janssen, M.F.W.H.A. (author), Csáki, Csaba (author), Lindgren, Ida (author), Loukis, Euripidis (author), Melin, Ulf (author), Pereira, Gabriela Viale (author), Bolívar, Manuel Pedro Rodríguez (author), Tambouris, Efthimios (author)
contribution to periodical 2022
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Chang, J. (author), Los, Johannes W.N. (author), Gourgues, Ronan (author), Steinhauer, Stephan (author), Dorenbos, S.N. (author), Pereira, S.F. (author), Urbach, Paul (author), Zwiller, Val (author), Esmaeil Zadeh, I.Z. (author)
Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery time, SNSPDs outperform conventional single-photon detection...
journal article 2022
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Dou, X. (author), Min, Changjun (author), Zhang, Yuquan (author), Pereira, S.F. (author), Yuan, Xiaocong (author)
Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a step-shaped silicon nanostructure. By employing an optical singular...
journal article 2022
document
Soman, S. (author), Pereira, S.F. (author), El Gawhary, O. (author)
In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which they can be used. In this paper, we report on the first results on...
journal article 2022
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