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Sub-Orbital Flight Demonstration of a 183/540–600 GHz Hybrid CMOS-InP and CMOS-Schottky-MEMS Limb-Sounder
Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments
Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration
Low power AlGaN/GaN MEMS pressure sensor for high vacuum application
MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications
High aspect ratio spiral resonators for process variation investigation and MEMS applications
Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices
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