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Microfabricated albedo insensitive sun position sensor system in silicon carbide with integrated 3D optics and CMOS electronics

Romijn, J. (author), Vollebregt, S. (author), de Bie, Vincent G. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

The next generation of satellites will need to tackle tomorrow's challenges for communication, navigation and observation. In order to do so, it is expected that the amount of satellites in orbit will keep increasing, form smart constellations and miniaturize individual satellites to make access to space cost effective. To enable this next...

journal article 2023

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Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology

Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a...

journal article 2022

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Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, Johan (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are...

journal article 2022

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Deployed measurement-device independent quantum key distribution and Bell-state measurements coexisting with standard internet data and networking equipment

Berrevoets, R.C. (author), Middelburg, T. (author), Vermeulen, R.F.L. (author), Chiesa, Luca Della (author), Broggi, Federico (author), Piciaccia, Stefano (author), Umesh, P. (author), Tittel, W. (author), Slater, J.A. (author)

The forthcoming quantum Internet is poised to allow new applications not possible with the conventional Internet. The ability for both quantum and conventional networking equipment to coexist on the same fiber network would facilitate the deployment and adoption of coming quantum technology. Most quantum networking tasks, like quantum...

journal article 2022

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Simulation for stability of a beam-mass based high-resolution MEMS gravimeter

Ye, Guigen (author), Fan, X. (author), Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, René H. (author), Zhang, Kouchi (author)

In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in...

journal article 2022

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Polyphosphate Dynamics in Cable Bacteria

Geerlings, Nicole M.J. (author), Kienhuis, Michiel V.M. (author), Hidalgo-Martinez, Silvia (author), Hageman, R. (author), Vasquez Cardenas, D. (author), Middelburg, Jack J. (author), Meysman, F.J.R. (author), Polerecky, Lubos (author)

Cable bacteria are multicellular sulfide oxidizing bacteria that display a unique metabolism based on long-distance electron transport. Cells in deeper sediment layers perform the sulfide oxidizing half-reaction whereas cells in the surface layers of the sediment perform the oxygen-reducing half-reaction. These half-reactions are coupled via...

journal article 2022

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Cell Cycle, Filament Growth and Synchronized Cell Division in Multicellular Cable Bacteria

Geerlings, Nicole M.J. (author), Geelhoed, Jeanine S. (author), Vasquez Cardenas, D. (author), Kienhuis, Michiel V.M. (author), Hidalgo-Martinez, Silvia (author), Boschker, H.T.S. (author), Middelburg, Jack J. (author), Meysman, F.J.R. (author), Polerecky, Lubos (author)

Cable bacteria are multicellular, Gram-negative filamentous bacteria that display a unique division of metabolic labor between cells. Cells in deeper sediment layers are oxidizing sulfide, while cells in the surface layers of the sediment are reducing oxygen. The electrical coupling of these two redox half reactions is ensured via long...

journal article 2021

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Drivers of nitrogen and phosphorus dynamics in a groundwater-fed urban catchment revealed by high-frequency monitoring

Yu, Liang (author), Rozemeijer, Joachim C. (author), Peter Broers, Hans (author), van Breukelen, B.M. (author), Middelburg, Jack J. (author), Ouboter, Maarten (author), Van Der Velde, Ype (author)

Eutrophication of water bodies has been a problem causing severe degradation of water quality in cities. To gain mechanistic understanding of the temporal dynamics of nitrogen (N) and phosphorus (P) in a groundwater-fed lowlying urban polder, we applied high-frequency monitoring in Geuzenveld, a polder in the city of Amsterdam. The...

journal article 2021

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Resistive and CTAT Temperature Sensors in a Silicon Carbide CMOS Technology

Romijn, J. (author), Middelburg, L.M. (author), Vollebregt, S. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

Accurately sensing the temperature in silicon carbide (power) devices is of great importance to their reliable operation. Here, temperature sensors by resistive and CMOS structures are fabricated and characterized in an open silicon carbide CMOS technology. Over a range of 25-200°C, doped design layers have negative temperature coefficients of...

conference paper 2021

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Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)

The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...

journal article 2021

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From Silicon toward Silicon Carbide Smart Integrated Sensors

Middelburg, L.M. (author)

doctoral thesis 2020

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Exploring the response of a resistive soot sensor to AC electric excitation

Middelburg, L.M. (author), Ghaderi, M. (author), Visser, J.H. (author), Wolffenbuttel, R.F. (author)

The resistive particulate matter sensor is a simple device that transduces the presence of soot through impedance change across inter-digital electrodes (IDEs). We investigate the information provided by impedance spectroscopy over the frequency range from 100 Hz to 10 kHz for two purposes. The first is to investigate the opportunities for an...

journal article 2020

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Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration

Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)

This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...

journal article 2020

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Low power AlGaN/GaN MEMS pressure sensor for high vacuum application

Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)

A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...

journal article 2020

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Impedance Spectroscopy for Enhanced Data Collection of Conductometric Soot Sensors

Middelburg, L.M. (author), Ghaderi, Mohammadamir (author), Bilby, David (author), Visser, J.H. (author), Zhang, Kouchi (author), Wolffenbuttel, R.F. (author)

Impedance spectroscopy in the frequency range 100 Hz to 10 kHz has been applied to the Inter-Digitated Electrode (IDE) structure that is conventionally operated as a resistive sensor for the measurement of Particulate Matter (PM). The measurement of both the in-phase (resistive) and out-of-phase (capacitive) components of the impedance over this...

conference paper 2020

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Maintaining transparency of a heated MEMs membrane for enabling long-term optical measurements on soot-containing exhaust gas

Middelburg, L.M. (author), Ghaderi, Mohammadamir (author), Bilby, David (author), Visser, Jaco H. (author), Zhang, Kouchi (author), Lundgren, Per (author), Enoksson, Peter (author), Wolffenbuttel, R.F. (author)

Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of sootcontaining exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable...

journal article 2020

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From bioethanol containing fuels towards a fuel economy that includes methanol derived from renewable sources and the impact on European Union decision-making on transition pathways

Bonenkamp, T.B. (author), Middelburg, L.M. (author), Hosli, M.O. (author), Wolffenbuttel, R.F. (author)

Decision-making on the optimum transition pathway to an energy economy that meets agreed carbon reduction goals in the European Union (EU) by 2050 is challenging, because of the size of the infrastructural legacy, technological uncertainties, affordability and assumptions on future energy demand. This task is even more complicated in...

journal article 2020

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Orbital and Spin Dynamics of Single Neutrally-Charged Nitrogen-Vacancy Centers in Diamond

Baier, S. (author), Bradley, C.E. (author), Middelburg, T. (author), Dobrovitski, V.V. (author), Taminiau, T.H. (author), Hanson, R. (author)

The neutral charge state plays an important role in quantum information and sensing applications basedon nitrogen-vacancy centers. However, the orbital and spin dynamics remain unexplored. Here, we useresonant excitation of single centers to directly reveal the fine structure, enabling selective addressing ofspin-orbit states. Through pump-probe...

journal article 2020

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Health Monitoring for Lighting Applications

van Driel, W.D. (author), Middelburg, L.M. (author), el Mansouri, B. (author), B.J.C., JAcobs (author)

Traditional lighting is focused on the prevention of hardware failures. With the trend towards controlled and connected systems, other components will start playing an equal role in the reliability of it. Here reliability needs to be replaced by availability and other modeling approaches are to be considered. System prognostics and health...

book chapter 2020

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From Si Towards SiC Technology for Harsh Environment Sensing

Middelburg, L.M. (author), van Driel, W.D. (author), Zhang, Kouchi (author)

In the coming decade, the development in the area of More than Moore will certainly take over from Moore’s Law. Sensor development and sensor integration will prevail above lower node development. New packaging solutions will be developed which will fuel the integration of sensors. These developments can still be silicon based but where harsh...

book chapter 2020