Searched for: +
(1 - 20 of 33)

Pages

List view
Grid view
document
Hong, H. (author), Wei, Jiangtao (author), Lei, Xin (author), Chen, Haiyun (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)
Correction to: Microsystems &amp; Nanoengineering published online 16 May 2023 Correction Following publication of the original article<sup>1</sup>, it was noticed that the phrase ‘DNA sequencing’ is incorrect, which should be replaced by ‘biosensing’. The original paper has been updated.
journal article 2023
document
Zhan, Teng (author), Sun, Jianwen (author), Feng, Tao (author), Zhang, Yulong (author), Zhou, Binru (author), Zhang, Banghong (author), Wang, Junxi (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
The authors regret an error in the abstract of the published article: the text ‘‘(i) the Schottky emission mechanism at a low reverse voltage (0–1 V) before the current is fully turned on.’’ should be changed to ‘‘(i) the Schottky emission mechanism at a low reverse voltage (0 to 1 V) before the current is fully turned on.’’ This change does...
journal article 2023
document
Romijn, J. (author), Vollebregt, S. (author), de Bie, Vincent G. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
The next generation of satellites will need to tackle tomorrow's challenges for communication, navigation and observation. In order to do so, it is expected that the amount of satellites in orbit will keep increasing, form smart constellations and miniaturize individual satellites to make access to space cost effective. To enable this next...
journal article 2023
document
Hong, H. (author), Wei, Jiangtao (author), Lei, Xin (author), Chen, Haiyun (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)
The application of single-crystal silicon (SCS) nanopore structures in single-molecule-based analytical devices is an emerging approach for the separation and analysis of nanoparticles. The key challenge is to fabricate individual SCS nanopores with precise sizes in a controllable and reproducible way. This paper introduces a fast-stop ionic...
journal article 2023
document
Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a...
journal article 2022
document
Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, Johan (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are...
journal article 2022
document
Zhan, Teng (author), Sun, J. (author), Feng, Tao (author), Zhang, Yulong (author), Zhou, Binru (author), Zhang, Banghong (author), Wang, Junxi (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
Recent research focusing on wide-bandgap and two-dimensional materials with a Schottky junction has provided a new concept for ultraviolet photodetectors. However, the working mechanism of the Schottky junction-based detector varies depending on the photosensitive materials used and the device structure. We demonstrated a TiO<sub>2</sub>...
journal article 2022
document
Romijn, J. (author), Vollebregt, S. (author), May, Alexander (author), Erlbacher, Tobias (author), van Zeijl, H.W. (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of...
conference paper 2022
document
Romijn, J. (author), Sanseven, Seçil (author), Zhang, Kouchi (author), Vollebregt, S. (author), Sarro, Pasqualina M (author)
An angle sensitive optical sensor without conventional optics is presented in this article. The reported device omits the need for adding 3-D optics in postprocessing by monolithic integration of complimentary metal-oxide semiconductor compatible diffraction grating layers, which cuts down the fabrication costs and allows for miniaturization...
journal article 2022
document
Aydogmus, H. (author), van Ginkel, H.J. (author), Galiti, A-D. (author), Hu, M.H.Y. (author), Frimat, J-P. (author), van den Maagdenberg, A.M.J.M. (author), Zhang, Kouchi (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)
poster 2021
document
Sun, J. (author), Zhan, Teng (author), Sokolovskij, R. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
Based on our proposed precision two-step gate recess technique, a suspended gate-recessed Pt/AlGaN/GaN heterostructure gas sensor integrated with a micro-heater is fabricated and characterized. The controllable two-step gate recess etching method, which includes O2 plasma oxidation of nitride and wet etching, improves gas sensing performance....
journal article 2021
document
Romijn, J. (author), Middelburg, L.M. (author), Vollebregt, S. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
Accurately sensing the temperature in silicon carbide (power) devices is of great importance to their reliable operation. Here, temperature sensors by resistive and CMOS structures are fabricated and characterized in an open silicon carbide CMOS technology. Over a range of 25-200°C, doped design layers have negative temperature coefficients of...
conference paper 2021
document
Hong, H. (author), Ye, Li (author), Li, Ke (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)
In this paper, we report a modified three step anisotropic wet etching (TSWE) method to fabricate solid-state silicon nanoslits. The slit-opening process is performed by &lt;111&gt; crystal plane etching. The etching rate of the &lt;111&gt; crystal plane is reasonably slow as it is only 1/45 of the &lt;100&gt; etching rate, thus allowing and...
conference paper 2021
document
Aydogmus, H. (author), van Ginkel, H.J. (author), Galiti, Anna-Danai (author), Hu, Michel (author), Frimat, Jean-Philippe (author), van den Maagdenberg, Arn (author), Zhang, Kouchi (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)
Continuous monitoring of tissue microphysiology is a key enabling feature of the organ-on-chip (OoC) approach for drug screening and disease modeling. Sensing charged species in OoC tissue microenvironments is thereby essential. However, the inherently small (i.e., cm) size of OoC devices poses the challenging requirement to integrate...
conference paper 2021
document
Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author), Leijtens, Johan (author), Sarro, Pasqualina M (author)
In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with...
conference paper 2021
document
Sokolovskij, R. (author), Zhang, Jian (author), Zheng, Hongze (author), Li, Wenmao (author), Jiang, Y. (author), Yang, Gaiying (author), Yu, H. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H 2 response at high...
journal article 2020
document
Aydogmus, H. (author), van Ginkel, H.J. (author), Mastrangeli, Massimo (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
<br/>
poster 2020
document
Sun, J. (author), Zhang, Shuo (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Li, Jinmin (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
A high responsivity and controllable recovery ultraviolet (UV) photodetector based on a tungsten oxide (WO<sub>3</sub>) gate AlGaN/GaN heterostructure with an integrated micro-heater is reported for the first time. The WO<sub>3</sub>nanolayer was deposited by physical vapor deposition (PVD) for deep UV absorption and the micro-heater was...
journal article 2020
document
Sokolovskij, R. (author), Zhang, Jian (author), Zheng, Hongze (author), Li, Wenmao (author), Jiang, Yang (author), Yang, Gaiying (author), Yu, Hongyu (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H2 response at high...
journal article 2020
document
Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...
journal article 2020
Searched for: +
(1 - 20 of 33)

Pages

List view
Grid view