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Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...journal article 2009
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- Sarro, P.M. (author), Ng, K.T. (author), Burghartz, J.N. (author) journal article 2001
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Van Zeijl, H.W. (author), Wei, J. (author), Shen, C. (author), Verhaar, T.M. (author), Maury, P. (author), Sarro, P.M. (author)Lithography for IC device fabrication is a high volume high accuracy production technology. Such production characteristics are also attractive for MEMS and 3 dimensional (3D) integration processes. However, advanced lithography has a strong 2 dimensional (2D) nature and is not optimized to fabricate 3D structures. In this work, 5 exposure and...journal article 2010
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- Sonsky, J. (author), Valk, H. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author) journal article 1999
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- Della Corte, F.G. (author), Merenda, M. (author), Cocorullo, G. (author), Iodice, M. (author), Rendina, I. (author), Sarro, P.M. (author) journal article 2009
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Mele, L. (author), Rossi, T. (author), Riccio, M. (author), Iervolino, E. (author), Santagata, F. (author), Irace, A. (author), Breglio, G. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as...journal article 2011
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- Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), de Boer, M. (author), Czirr, J.B. (author), Chaminade, J.P. (author), Fouassier, C. (author) journal article 2001
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Chu Duc, T. (author), Lau, G.K. (author), Sarro, P.M. (author)The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no...journal article 2007
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Alan, T. (author), Yokosawa, T. (author), Gaspar, J. (author), Pandraud, G. (author), Paul, O. (author), Creemer, F. (author), Sarro, P.M. (author), Zandbergen, H.W. (author)Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high...journal article 2012
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Van Zeijl, H.W. (author), Wei, J. (author), Shen, C. (author), Verhaar, T.M. (author), Sarro, P.M. (author)Lithography as developed for IC device fabrication is a high volume high accuracy patterning technology with strong 2 dimensional (2D) characteristics. This 2D nature makes it a challenge to integrate this technology in a 3 dimensional (3D) manufacturing environment. This article addresses the performance of a waferstepper (ASML PAS5000) in...journal article 2010
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Mele, L. (author), Santagata, F. (author), Panraud, G. (author), Morana, B. (author), Tichelaar, F.D. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a new process for the fabrication of MEMS-based nanoreactors for in situ atomic-scale imaging of nanoparticles under relevant industrial conditions. The fabrication of the device is completed fully at wafer level in an ISO 5 clean room and it is based on silicon fusion bonding and thin film encapsulation for sealed lateral...journal article 2010
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Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author)The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...journal article 2013
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Rajaraman, V. (author), Pakula, L.S. (author), Yang, H. (author), French, P.J. (author), Sarro, P.M. (author)Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...journal article 2011
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Testa, G. (author), Huang, Y. (author), Sarro, P.M. (author), Zeni, L. (author), Bernini, R. (author)The feasibility of an integrated silicon optofluidic ring resonator is demonstrated. Liquid core antiresonant reflecting optical waveguides are used to realize a rectangular ring resonator with a multimode interference liquid core coupler between the ring and the bus waveguide. In this configuration the same waveguide used to confine the light...journal article 2010
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Fiorentino, G. (author), Syed, W. (author), Adam, A. (author), Neto, A. (author), Sarro, P.M. (author)The refractive index of a conventional dielectric layer can be enhanced using an Artificial Dielectric Layer (ADL). Here we present the fabrication of low temperature PECVD Silicon Carbide (SiC) membranes with very high refractive index (up to 5 at 1 THz) in the terahertz frequency range. The SiC deposition parameters have been tuned to reach a...journal article 2014
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- Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), French, P.J. (author), Sarro, P.M. (author) journal article 2006
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Vdovin, G. (author), Middelhoek, S. (author), Sarro, P.M. (author)The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m...journal article 1997
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012
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- Sonsky, J. (author), Valk, H. (author), Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author) journal article 1999
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Testa, G. (author), Persichetti, G. (author), Sarro, P.M. (author), Bernini, R. (author)A hybrid silicon-poly(dimethysiloxane) (PDMS) optofluidic platform for lab-on-a-chip applications is proposed. A liquid-core waveguide with a self-aligned solid-core waveguide and a microfluidic device are integrated with a multilayer approach, resulting in a three-dimensional device assembly. The optofluidic layer was fabricated with a hybrid...journal article 2014