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Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications
Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides
Single-Mask Fabrication of Temperature Triggered MEMS Switch for Cooling Control in SSL System
Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating
Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors
Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
6 DOF Force and Torque Sensor for Micro-manipulation Applications
In situ HRTEM of a catalyst using a nanoreactor at 1 bar
Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations
Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity
Reflectance-based Photonic Crystal Liquid Sensors Made of ALD TiO2
Suspended Submicron Silicon-Beam for High Sensitivity Piezoresistive Sensing
A Buried Vertical Filter for Micro and Nanoparticle Filtration
PECVD silicon carbide surface micromachining technology and selected MEMS applications
From 2-Dimensional Lithography To 3-Dimensional Structures
From 2D Lithography to 3D Patterning
MEMS silicon-based micro-evaporator with diamond-shaped fins
Temperature dependence of the resonance frequency of thermogravimetric devices
From 2D Lithography to 3D Patterning
Integrated silicon optofluidic ring resonator
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