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Vollebregt, S. (author), Ricciardella, F. (author), Romijn, J. (author), Singh, M. (author), Shi, Shengtai (author), Sarro, Pasqualina M (author)
abstract 2018
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Prodanovic, V. (author), Chan, H.W. (author), van der Graaf, H. (author), Sarro, Pasqualina M (author)
In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si <sub>x</sub> N <sub>y</sub> ) and atomic layer deposited alumina (Al<sub...
journal article 2018
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Arik, Y.B. (author), Stassen, O.M.J.A. (author), van der Meer, A.D. (author), Bouten, C.V.C. (author), van den Berg, A. (author), Dekker, R. (author), Sarro, Pasqualina M (author)
We present a novel method to easily and reliably transfer highly porous, large area, thin microfabricated Polydimethylsiloxane (PDMS) porous membranes on Lab-on-Chip (LOC) and Organ-on-Chip (OOC) devices. The use of silicon as carrier substrate and a water-soluble sacrificial layer allows a simple and reproducible transfer of the membranes to...
conference paper 2018
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Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)
In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....
journal article 2018
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Silvestri, C. (author), Riccio, Michele (author), Poelma, René H. (author), Jovic, A. (author), Morana, B. (author), Vollebregt, S. (author), Irace, Andrea (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)
The high aspect ratio and the porous nature of spatially oriented forest-like carbon nanotube (CNT) structures represent a unique opportunity to engineer a novel class of nanoscale assemblies. By combining CNTs and conformal coatings, a 3D lightweight scaffold with tailored behavior can be achieved. The effect of nanoscale coatings, aluminum...
journal article 2018
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Gaio, N. (author), Waafi, A. (author), Vlaming, M.L.H. (author), Boschman, E. (author), Dijkstra, P. (author), Nacken, O. (author), Braam, S.R. (author), Boucsein, C. (author), Sarro, Pasqualina M (author), Dekker, R. (author)
This work presents the first multi-well plate that allows for simultaneous mechanical stimulation and electrical monitoring of multiple in-vitro cell cultures in parallel. Each well of the plate is equipped with an Organ-on-Chip (OOC) device consisting of a stretchable micro-electrode array (MEA). For the first time, a film assisted molding ...
conference paper 2018
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Alfaro, J.A. (author), Sberna, P.M. (author), Silvestri, C. (author), Mastrangeli, Massimo (author), Ishihara, R. (author), Sarro, Pasqualina M (author)
A novel, simple, low-cost method for the void-free filling of high aspect ratio (HAR) through-silicon-vias (TSVs) is presented. For the first-time pure indium, a type-I superconductor metal, is used to fill HAR vias, 300 to 500 μm in depth and 50 to 100 μm in diameter. The low electrical resistivity achieved without sintering, its...
conference paper 2018
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Jovic, A. (author), Uto, T. (author), Hei, K. (author), Sancho, Juan (author), Sanchez, Nuria (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo, Eduardo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)
A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power...
conference paper 2018
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Sokolovskij, R. (author), Zhang, Jian (author), Iervolino, E. (author), Zhao, Changhui (author), Santagata, F. (author), Wang, F. (author), Yu, Hongyu (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
AlGaN/GaN high electron mobility transistor (HEMT)-based sensors with catalytic platinum gate were micro-fabricated on commercially available epitaxial wafers and extensively characterized for ppm level hydrogen sulfide (H<sub>2</sub>S) detection for industrial safety applications. High operating temperature above 150 °C enabled large signal...
journal article 2018
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Pennazza, Giorgio (author), Santonico, Marco (author), Vollero, Luca (author), Zompanti, A. (author), Sabatini, A. (author), Kumar, Nandeesh (author), Pini, Ivan (author), Quiros Solano, W.F. (author), Sarro, Pasqualina M (author), D'Amico, Arnaldo (author)
This paper presents an advanced voltammetric system to be used as electronic tongue for liquid and gas analysis. It has been designed to be more flexible and accurate with respect to other existing and similar systems. It features improved electronics and additional operative conditions. Among others these include the possibility to optically...
journal article 2018
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Romijn, J. (author), Vollebregt, S. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author)
Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure...
conference paper 2018
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Prodanovic, V. (author), Chan, H.W. (author), Mane, Anil U. (author), Elam, Jeffrey W. (author), Minjauw, Matthias M. (author), Detavernier, Christophe (author), van der Graaf, H. (author), Sarro, Pasqualina M (author)
This study reports on the secondary electron emission (SEE) performance of atomic layer deposited MgO films, with thicknesses in the range from 5 to 25 nm, for the application in the Timed Photon Counter. In this novel, photodetector MgO is utilized as a material for the fabrication of ultrathin transmission dynodes (tynodes). Two different...
journal article 2018
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Iannacci, J. (author), Serra, E. (author), Sordo, G. (author), Bonaldi, M. (author), Borrielli, A. (author), Schmid, U. (author), Schneider, M.D. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)
In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy...
journal article 2018
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Santagata, F. (author), Sun, J. (author), Iervolino, E. (author), Yu, H. (author), Wang, F. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author), Zhang, Guoyi (author)
Purpose: The purpose of this paper is to demonstrate a novel 3D system-in-package (SiP) approach. This new packaging approach is based on stacked silicon submount technology. As demonstrators, a smart lighting module and a sensor systems were successfully developed by using the fabrication and assembly process described in this paper. Design...
journal article 2018
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Quiros Solano, W.F. (author), Gaio, N. (author), Stassen, O.M.J.A. (author), Arik, Y.B. (author), Silvestri, C. (author), Van Engeland, N.C.A. (author), Van der Meer, A. (author), Passier, R. (author), Sahlgren, C.M. (author), Bouten, C.V.C. (author), van den Berg, A. (author), Dekker, R. (author), Sarro, Pasqualina M (author)
We present a novel and highly reproducible process to fabricate transferable porous PDMS membranes for PDMS-based Organs-on-Chips (OOCs) using microelectromechanical systems (MEMS) fabrication technologies. Porous PDMS membranes with pore sizes down to 2.0 μm in diameter and a wide porosity range (2–65%) can be fabricated. To overcome issues...
journal article 2018
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Serra, E. (author), Morana, B. (author), Borrielli, Antonio (author), Marin, Francesco (author), Pandraud, G. (author), Pontin, Antonio (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author), Bonaldi, Michele (author)
Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an...
journal article 2018
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, A. (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)
According to quantum mechanics, if we keep observing a continuous variable we generally disturb its evolution. For a class of observables, however, it is possible to implement a so-called quantum nondemolition measurement: by confining the perturbation to the conjugate variable, the observable is estimated with arbitrary accuracy, or prepared...
journal article 2018
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Miscuglio, Mario (author), Alfano, Brigida (author), Miglietta, Maria L (author), Massera, Ettore (author), Di Francia, Girolamo (author), Sarro, Pasqualina M (author)
The crystal structure of graphene flakes is expected to significantly affect their sensing properties. Here we report an experimental investigation on the crystalline structure of graphene aimed at exploring the effects on the gas sensing properties. The morphology of graphene, prepared via Chemical Vapor Deposition (CVD), Liquid Phase...
journal article 2017
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, Antonio (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)
Summary form only given. According to quantum mechanics, there exists a class of observables for which is possible to confine the perturbation produced by a continuous measurement to the conjugate variable. Therefore, it is possible to devise experimental schemes that allow estimating the observed variable with arbitrary accuracy, or preparing...
abstract 2017
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Pandraud, G. (author), Milosavljevic, S. (author), Sammak, A. (author), Cherchi, Matteo (author), Jovic, A. (author), Sarro, Pasqualina M (author)
In this work, we present the results of integrated Ge detectors grown on a Si photonic platform for sensing applications. The detectors are fabricated on a passive photonic circuit for maximum coupling efficiency. Measurement results at 1300 nm wavelength show a responsivity of 0.2 A/W and very low dark current levels. For a voltage range...
conference paper 2017
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