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Splinter, R. (author), Van Herwaarden, A.W. (author), Iervolino, E. (author), Vanden Poel, G. (author), Istrate, D. (author), Sarro, P.M. (author)This paper investigates the possibility to measure protein denaturation with Fast Differential Scanning Calorimetry (FDSC). Cancer can be diagnosed by measuring protein denaturation in blood plasma using Differential Scanning Calorimetry (DSC). FDSC can reduce diagnosis time from hours to minutes, requiring significantly smaller sample...journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author)The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...journal article 2013
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Testa, G. (author), Persichetti, G. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)Over the last years optofluidics has emerged as a very promising field. The integration at microscopic level between optics and microfluidics provides a number of unique characteristics that cannot be obtained with solid materials only. This paper briefly reviews the state of the art on optofluidics for sensing applications. We first describe...conference paper 2013
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Testa, G. (author), Persichetti, G. (author), Sarro, P.M. (author), Bernini, R. (author)A hybrid silicon-poly(dimethysiloxane) (PDMS) optofluidic platform for lab-on-a-chip applications is proposed. A liquid-core waveguide with a self-aligned solid-core waveguide and a microfluidic device are integrated with a multilayer approach, resulting in a three-dimensional device assembly. The optofluidic layer was fabricated with a hybrid...journal article 2014
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Fiorentino, G. (author), Syed, W. (author), Adam, A. (author), Neto, A. (author), Sarro, P.M. (author)The refractive index of a conventional dielectric layer can be enhanced using an Artificial Dielectric Layer (ADL). Here we present the fabrication of low temperature PECVD Silicon Carbide (SiC) membranes with very high refractive index (up to 5 at 1 THz) in the terahertz frequency range. The SiC deposition parameters have been tuned to reach a...journal article 2014
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Syed, W.H. (author), Fiorentino, G. (author), Cavallo, D. (author), Spirito, M. (author), Sarro, Pasqualina M (author), Neto, A. (author)In this paper, we demonstrate, at 300 GHz and with integrated technology, the effectiveness of artificial dielectric layers to enhance the front-to-back ratio of printed antennas. This concept was previously proposed at microwave frequencies and using printed circuit board technology. The artificial material is now realized by introducing non...journal article 2015
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Prodanovic, V. (author), Chan, H.W. (author), Smedley, J. (author), Theulings, A. (author), Tao, S. (author), Van der Graaf, H. (author), Sarro, P.M. (author)The excellent overall properties of silicon nitride, particularly its mechanical strength and resistance to many etchants, make it a widely used material for microsensors and microactuators. In this paper silicon-rich silicon nitride (SRN) films were investigated as material for ultra-thin transmission dynodes in electron multiplication. These...journal article 2015
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices...conference paper 2016
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Vollebregt, S. (author), Alfano, B. (author), Ricciardella, F. (author), Giesbers, A.J.M. (author), Hagendoorn, Y. (author), van Zeijl, H.W. (author), Polichetti, T (author), Sarro, Pasqualina M (author)In this paper we report a novel transfer-free graphene fabrication process, which does not damage the graphene layer. Uniform graphene layers on 4" silicon wafers were deposited by chemical vapor deposition using the CMOS compatible Mo catalyst. Removal of the Mo layer after graphene deposition results in a transfer-free and controlled placement...conference paper 2016
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Precision Recess of AlGaN/GaN with Controllable Etching Rate Using ICP-RIE Oxidation and Wet EtchingSokolovskij, R. (author), Sun, J. (author), Santagata, F. (author), Iervolino, E. (author), Li, S. (author), Zhang, G.Y. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A method for highly controllable etching of AlGaN/GaN for the fabrication of high sensitivity HEMT based sensors is developed. The process consists of cyclic oxidation of nitride with O<sub>2</sub> plasma using ICP-RIE etcher followed by wet etching of the oxidized layer. Previously reported cyclic oxidation-based GaN etching obtained very...journal article 2016
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Thomas, S. (author), Jovic, A. (author), Morana, B. (author), Buja, F. (author), Gkouzou, A. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...journal article 2016
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Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)Sensing and stimulating microstructures are necessary to develop more specialized and highly accurate Organ-on-Chip (OOC) platforms. In this paper, we present the integration of a conductive polymer, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), on a stretchable membrane, core element of an Heart-on-Chip. The electrical...journal article 2016
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Silvestri, C. (author), Riccio, M. (author), Poelma, R.H. (author), Morana, B. (author), Vollebregt, S. (author), Santagata, F. (author), Irace, A. (author), Zhang, G.Q. (author), Sarro, P.M. (author)Thermal material properties play a fundamental role in the thermal management of microelectronic systems. The porous nature of carbon nanotube (CNT) arrays results in a very high surface area to volume ratio, which makes the material attractive for surface driven heat transfer mechanisms. Here, we report on the heat transfer performance of...journal article 2016
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Li, X. (author), Wei, L. (author), Poelma, René H. (author), Vollebregt, S. (author), Wei, J. (author), Urbach, Paul (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)This paper presents a tuneable binary amplitude Fresnel lens produced by wafer-level microfabrication. The Fresnel lens is fabricated by encapsulating lithographically defined vertically aligned carbon nanotube (CNT) bundles inside a polydimethyl-siloxane (PDMS) layer. The composite lens material combines the excellent optical absorption...journal article 2016
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Gaio, N. (author), van Meer, B. (author), Quiros Solano, W.F. (author), Bergers, L. (author), van de Stolpe, A. (author), Mummery, CL (author), Sarro, Pasqualina M (author), Dekker, R. (author)Organ-on-Chips (OOCs) are micro-fabricated devices which are used to culture cells in order to mimic functional units of human organs. The devices are designed to simulate the physiological environment of tissues in vivo. Cells in some types of OOCs can be stimulated in situ by electrical and/or mechanical actuators. These actuations can mimic...journal article 2016
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, Antonio (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)Summary form only given. According to quantum mechanics, there exists a class of observables for which is possible to confine the perturbation produced by a continuous measurement to the conjugate variable. Therefore, it is possible to devise experimental schemes that allow estimating the observed variable with arbitrary accuracy, or preparing...abstract 2017
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Pandraud, G. (author), Milosavljevic, S. (author), Sammak, A. (author), Cherchi, Matteo (author), Jovic, A. (author), Sarro, Pasqualina M (author)In this work, we present the results of integrated Ge detectors grown on a Si photonic platform for sensing applications. The detectors are fabricated on a passive photonic circuit for maximum coupling efficiency. Measurement results at 1300 nm wavelength show a responsivity of 0.2 A/W and very low dark current levels. For a voltage range...conference paper 2017
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Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient ConditionsRicciardella, F. (author), Vollebregt, S. (author), Polichetti, T. (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)In this paper we report on gas sensors based on graphene grown by Chemical Vapor Deposition at 850 °C. Mo was used as catalyst for graphene nucleation. Resistors were directly designed on pre-patterned Mo using the transfer-free process we recently developed, thus avoiding films damage during the transfer to the target substrate. Devices...conference paper 2017
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- Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T. (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author) abstract 2017