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Verhaar, T.M. (author), Wei, J. (author), Sarro, P.M. (author)In this paper, a process to realize metal lines on the sidewall of high aspect ratio cavities is developed. As an alternative to conventional photoresist, SU8 is used to define patterns on vertical sidewalls of deep cavities while maintaining compatibility with conventional IC processes. When transferring a pattern onto a 3D structure,...journal article 2009
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Tran, A.T. (author), Schellevis, H. (author), Pham, H.T.M. (author), Shen, C. (author), Sarro, P.M. (author)Aluminum Nitride thin films with the desired properties for piezoelectric actuators are grown by pulsed DC sputtering on Si (100) substrates coated with different seed layers (Al/1%Si, Mo, Ti). The influence of sputtering parameters and the seed layers on crystallinity and orientation of the AlN films is investigated. Raman spectroscopy...journal article 2010
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Splinter, R. (author), Van Herwaarden, A.W. (author), Iervolino, E. (author), Vanden Poel, G. (author), Istrate, D. (author), Sarro, P.M. (author)This paper investigates the possibility to measure protein denaturation with Fast Differential Scanning Calorimetry (FDSC). Cancer can be diagnosed by measuring protein denaturation in blood plasma using Differential Scanning Calorimetry (DSC). FDSC can reduce diagnosis time from hours to minutes, requiring significantly smaller sample...journal article 2012
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- Duc, T.C. (author), Lau, G.K. (author), Sarro, P.M. (author) journal article 2008
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Wei, J. (author), Ye, H. (author), Van Zeijl, H.W. (author), Sarro, P.M. (author), Zhang, G.Q. (author)A micro-electro-mechanical-system (MEMS) based, temperature triggered, switch is developed as a cost-effective solution for smart cooling control of solid-state-lighting systems. The switch (1.0x0.4 mm2) is embedded in a silicon substrate and fabricated with a single-mask 3D micro-machining process. The device switches on at a designed...journal article 2012
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- French, P.J. (author), van Drieenhuizen, B.P. (author), Poenar, D. (author), Goosen, J.F.L. (author), Mallee, R. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author) journal article 1996
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Alan, T. (author), Aravindh, V. (author), Wunnicke, O. (author), Sarro, P.M. (author)Very thin piezoelectric cantilevers based on AlN layers using titanium Ti thin film electrodes are fabricated and characterized. By optimizing the Ti sputtering parameters, a very low stress (156 MPa) layers stack with high crystallinity and strong (002) orientation of the AlN films is obtained. Finally, a simple fabrication process, fully CMOS...journal article 2011
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Prodanovic, V. (author), Chan, H.W. (author), Smedley, J. (author), Theulings, A. (author), Tao, S. (author), Van der Graaf, H. (author), Sarro, P.M. (author)The excellent overall properties of silicon nitride, particularly its mechanical strength and resistance to many etchants, make it a widely used material for microsensors and microactuators. In this paper silicon-rich silicon nitride (SRN) films were investigated as material for ultra-thin transmission dynodes in electron multiplication. These...journal article 2015
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...journal article 2012
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- Sonsky, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), Kouchpil, V. (author) journal article 2001
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Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...journal article 2009
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- Sarro, P.M. (author), Ng, K.T. (author), Burghartz, J.N. (author) journal article 2001
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Van Zeijl, H.W. (author), Wei, J. (author), Shen, C. (author), Verhaar, T.M. (author), Maury, P. (author), Sarro, P.M. (author)Lithography for IC device fabrication is a high volume high accuracy production technology. Such production characteristics are also attractive for MEMS and 3 dimensional (3D) integration processes. However, advanced lithography has a strong 2 dimensional (2D) nature and is not optimized to fabricate 3D structures. In this work, 5 exposure and...journal article 2010
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- Sonsky, J. (author), Valk, H. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author) journal article 1999
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- Della Corte, F.G. (author), Merenda, M. (author), Cocorullo, G. (author), Iodice, M. (author), Rendina, I. (author), Sarro, P.M. (author) journal article 2009
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Mele, L. (author), Rossi, T. (author), Riccio, M. (author), Iervolino, E. (author), Santagata, F. (author), Irace, A. (author), Breglio, G. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as...journal article 2011
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- Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), de Boer, M. (author), Czirr, J.B. (author), Chaminade, J.P. (author), Fouassier, C. (author) journal article 2001
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Chu Duc, T. (author), Lau, G.K. (author), Sarro, P.M. (author)The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no...journal article 2007
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Alan, T. (author), Yokosawa, T. (author), Gaspar, J. (author), Pandraud, G. (author), Paul, O. (author), Creemer, F. (author), Sarro, P.M. (author), Zandbergen, H.W. (author)Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high...journal article 2012
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Van Zeijl, H.W. (author), Wei, J. (author), Shen, C. (author), Verhaar, T.M. (author), Sarro, P.M. (author)Lithography as developed for IC device fabrication is a high volume high accuracy patterning technology with strong 2 dimensional (2D) characteristics. This 2D nature makes it a challenge to integrate this technology in a 3 dimensional (3D) manufacturing environment. This article addresses the performance of a waferstepper (ASML PAS5000) in...journal article 2010