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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires...journal article 2022
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Chan, H.W. (author), Prodanovic, V. (author), Theulings, A.M.M.G. (author), ten Bruggencate, T. (author), Hagen, C.W. (author), Sarro, Pasqualina M (author), van der Graaf, H. (author)Large-area transmission dynodes were fabricated by depositing an ultra-thin continuous film on a silicon wafer with a 3-dimensional pattern. After removing the silicon, a corrugated membrane with enhanced mechanical properties was formed. Mechanical metamaterials, such as this corrugated membrane, are engineered to improve its strength and...journal article 2022
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Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a...journal article 2022
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Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, Johan (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are...journal article 2022
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Chan, H.W. (author), Prodanovic, V. (author), Theulings, A.M.M.G. (author), Hagen, C.W. (author), Sarro, Pasqualina M (author), v.d. Graaf, H. (author)The (secondary) electron emission from multilayered Al2O3/TiN membranes has been investigated with a hemispherical collector system in a scanning electron microscope for electrons with energies between 0.3 and 10 keV. These ultra-thin membranes are designed to function as transmission dynodes in novel vacuum electron multipliers. Two...journal article 2021
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Serra, E. (author), Borrielli, Antonio (author), Marin, Francesco (author), Marino, Francesco (author), Malossi, Nicola (author), Morana, B. (author), Piergentili, Paolo (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author)Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators...journal article 2021
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Ricciardella, F. (author), Vollebregt, S. (author), Tilmann, Rita (author), Hartwig, Oliver (author), Bartlam, Cian (author), Sarro, Pasqualina M (author), Sachdev, Hermann (author), Duesberg, Georg S. (author)Chemical vapor deposition (CVD) has been demonstrated as a highly promising technique for the production of graphene on large scale and enabling tunability of the intrinsic defects of the films during the synthesis.<br/><br/>In this work, we report on the correlation between the density of defects (DoD) and the kinetics of interaction of multi...journal article 2021
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Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...journal article 2021
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Sun, J. (author), Zhan, Teng (author), Sokolovskij, R. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)Based on our proposed precision two-step gate recess technique, a suspended gate-recessed Pt/AlGaN/GaN heterostructure gas sensor integrated with a micro-heater is fabricated and characterized. The controllable two-step gate recess etching method, which includes O2 plasma oxidation of nitride and wet etching, improves gas sensing performance....journal article 2021
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sten (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up...journal article 2021
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Borrielli, A. (author), Bonaldi, M. (author), Serra, E. (author), Sarro, Pasqualina M (author), Morana, B. (author)Feedback-based control techniques are useful tools in precision measurements as they allow us to actively shape the mechanical response of high quality factor oscillators used in force detection measurements. In this paper, we implement a feedback technique on a high-stress low-loss SiN membrane resonator, exploiting the charges trapped on...journal article 2021
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Bonaldi, Michele (author), Borrielli, Antonio (author), Chowdhury, Avishek (author), Di Giuseppe, Gianni (author), Morana, B. (author), Piergentili, Paolo (author), Prodi, Giovanni A. (author), Sarro, Pasqualina M (author), Serra, E. (author)Abstract: Phenomenological models aiming to join gravity and quantum mechanics often predict effects that are potentially measurable in refined low-energy experiments. For instance, modified commutation relations between position and momentum, that account for a minimal scale length, yield a dynamics that can be codified in additional...journal article 2020
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Dostanic, M. (author), Stein, Jeroen (author), Windt, Laura (author), van Meer, Berend (author), Bellin, Milena (author), Orlova, Valeria (author), Mastrangeli, Massimo (author), Mummery, Christine (author), Sarro, Pasqualina M (author)We present a wafer-scale fabricated, PDMS-based platform for culturing miniaturized engineered heart tissues (EHTs) which allows highly accurate measurements of the contractile properties of these tissues. The design of the platform is an anisometrically downscaled version of the Heart-Dyno system, consisting of two elastic micropillars inside...journal article 2020
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sven (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)This paper presents the fabrication and electrical characterization of superconducting high-aspect ratio through-silicon vias DC-sputtered with aluminum. Fully conformal and void-free coating of 300 μm-deep and 50 μmwide vias with Al, a CMOS-compatible and widely available superconductor, was made possible by tailoring a funneled sidewall...journal article 2020
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Prodi, G. A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)Recent optomechanical experiments have observed nonclassical properties in macroscopic mechanical oscillators. A key indicator of such properties is the asymmetry in the strength of the motional sidebands produced in the probe electromagnetic field, which is originated by the noncommutativity between the oscillator ladder operators. Here we...journal article 2020
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Sokolovskij, R. (author), Zhang, Jian (author), Zheng, Hongze (author), Li, Wenmao (author), Jiang, Y. (author), Yang, Gaiying (author), Yu, H. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H 2 response at high...journal article 2020
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Sarro, Pasqualina M (author), Duesberg, Georg S. (author)Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of...journal article 2020
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Vezio, P. (author), Chowdhury, A. (author), Bonaldi, M. (author), Borrielli, Antonio (author), Marino, F. (author), Morana, B. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)We experimentally investigate a mechanical squeezed state realized in a parametrically modulated membrane resonator embedded in an optical cavity. We demonstrate that a quantum characteristic of the squeezed dynamics can be revealed and quantified even in a moderately warm oscillator, through the analysis of motional sidebands. We provide a...journal article 2020
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Ricciardella, F. (author), Vollebregt, S. (author), Boshuizen, B. (author), Danzl, F.J.K. (author), Cesar, Ilkay (author), Spinelli, Pierpaolo (author), Sarro, Pasqualina M (author)Chemical vapour deposition (CVD) has emerged as the dominant technique to combine high quality with large scale production of graphene. The key challenge for CVD graphene remains the transfer of the film from the growth substrate to the target substrate while preserving the quality of the material. Avoiding the transfer process of single or...journal article 2020
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Sun, J. (author), Zhang, Shuo (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Li, Jinmin (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A high responsivity and controllable recovery ultraviolet (UV) photodetector based on a tungsten oxide (WO<sub>3</sub>) gate AlGaN/GaN heterostructure with an integrated micro-heater is reported for the first time. The WO<sub>3</sub>nanolayer was deposited by physical vapor deposition (PVD) for deep UV absorption and the micro-heater was...journal article 2020