Bodermann, B. (author), Buhr, E. (author), Danzebrink, H.U. (author), Bär, M. (author), Scholze, F. (author), Krumrey, M. (author), Wurm, M. (author), Klapetek, P. (author), Hansen, P.E. (author), Korpelainen, V. (author), Van Veghel, M. (author), Yacoot, A. (author), Siitonen, S. (author), El Gawhary, O. (author), Burger, S. (author), Saastamoinen, T. (author) Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced...
conference paper 2011
