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Pontin, A. (author), Bonaldi, M. (author), Borrielli, Antonio (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)
Summary form only given. According to quantum mechanics, there exists a class of observables for which is possible to confine the perturbation produced by a continuous measurement to the conjugate variable. Therefore, it is possible to devise experimental schemes that allow estimating the observed variable with arbitrary accuracy, or preparing...
abstract 2017
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Pandraud, G. (author), Purniawan, A. (author), Margallo-Balbás, E. (author), Sarro, P.M. (author)
We fabricated horizontal slot waveguides using two low temperature deposition techniques ensuring the full compatibility of the processes with CMOS technology. Slots width as thin as 45 nm with smooth slot surfaces can easily be fabricated with simple photolithographic steps. Fundamental TM-like slot mode in which the E-field is greatly enhanced...
conference paper 2012
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Purniawan, A. (author), Pandraud, G. (author), Vakalopoulos, K.A. (author), French, P.J. (author), Sarro, P.M. (author)
conference paper 2012
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Pandraud, G. (author), Margallo-Balbás, E. (author), Sarro, P.M. (author)
Optical Coherence Tomography (OCT) has found applications in many fields of medicine and has a large potential for the optical biopsy of tumors. One of the technological challenges impairing faster adoption of OCT is the relative complexity of the optical instrumentation required, which translates into expensive and bulky setups. In this paper...
conference paper 2010
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Pandraud, G. (author), Pham, H.T.M. (author), Pakula, L.S. (author), Sarro, P.M. (author), French, P.J. (author)
Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully...
conference paper 2005
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Pandraud, G. (author), Milosavljevic, S. (author), Sammak, A. (author), Cherchi, Matteo (author), Jovic, A. (author), Sarro, Pasqualina M (author)
In this work, we present the results of integrated Ge detectors grown on a Si photonic platform for sensing applications. The detectors are fabricated on a passive photonic circuit for maximum coupling efficiency. Measurement results at 1300 nm wavelength show a responsivity of 0.2 A/W and very low dark current levels. For a voltage range...
conference paper 2017
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Jovic, A. (author), Uto, T. (author), Hei, K. (author), Sancho, Juan (author), Sanchez, Nuria (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo, Eduardo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)
A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power...
conference paper 2018
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Pontin, A. (author), Sarro, Pasqualina M (author)
We describe a method to control the cavity detuning in optomechanics experiments. This helps accurate measurements of the asymmetry in the motional sidebands, that testify the quantum behavior of the oscillator and quantifies its occupation number.
conference paper 2019
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Alan, T. (author), Aravindh, V. (author), Wunnicke, O. (author), Sarro, P.M. (author)
Very thin piezoelectric cantilevers based on AlN layers using titanium Ti thin film electrodes are fabricated and characterized. By optimizing the Ti sputtering parameters, a very low stress (156 MPa) layers stack with high crystallinity and strong (002) orientation of the AlN films is obtained. Finally, a simple fabrication process, fully CMOS...
journal article 2011
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)
We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...
journal article 2012
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Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)
A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...
journal article 2009
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Alan, T. (author), Yokosawa, T. (author), Gaspar, J. (author), Pandraud, G. (author), Paul, O. (author), Creemer, F. (author), Sarro, P.M. (author), Zandbergen, H.W. (author)
Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high...
journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author)
The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...
journal article 2013
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)
TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...
journal article 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)
A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...
journal article 2011
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Pandraud, G. (author), Margallo-Balbas, E. (author), Sarro, P.M. (author)
We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB?cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in...
journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Sarro, P.M. (author)
Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams with a thin PECVD silicon nitride (SiN) layer. Very good linearity and high deflection, up to 19 nm/V of actuation deflection for 200 ?m long cantilevers, at quasi-static mode, is obtained for a 500 nm SiN top layer. This value is three times larger...
journal article 2012
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Hagendoorn, Y. (author), Pandraud, G. (author), Vollebregt, S. (author), Morana, B. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author)
Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...
journal article 2022
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Thomas, S. (author), Jovic, A. (author), Morana, B. (author), Buja, F. (author), Gkouzou, A. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)
In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...
journal article 2016
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Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)
In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....
journal article 2018
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