Parameter retrieval of small particles in dark-field Fourier ptychography and a rectangle in real-space ptychography

We present a parameter retrieval method which incorporates prior knowledge about the object into ptychography. The proposed method is applied to two applications: (1) parameter retrieval of small particles from Fourier ptychographic dark field measurements; (2) parameter retrieval of a rectangular structure with real-space ptychography. The...

Improved ptychographic inspection of EUV reticles via inclusion of prior information

The development of actinic mask metrology tools represents one of the major challenges to be addressed on the roadmap of extreme ultra violet (EUV) lithography. Technological advancements in EUV lithography result in the possibility to print increasingly fine and highly resolved structures on a silicon wafer, however the presence of fine–scale...

Cramér-Rao lower bound and maximum-likelihood estimation in ptychography with Poisson noise

We investigate the performance of ptychography with noisy data by analyzing the Cramér-Rao lower bound. The lower bound of ptychography is derived and numerically computed for both top-hat plane wave and structured illumination. The influence of Poisson noise on the ptychography reconstruction is discussed. The computation result shows that,...

Automatic feature selection in EUV scatterometry

Scatterometry is an important nonimaging and noncontact method for optical metrology. In scatterometry certain parameters of interest are determined by solving an inverse problem. This is done by minimizing a cost functional that quantifies the discrepancy among measured data and model evaluation. Solving the inverse problem is mathematically...

Model-independent noise-robust extension of ptychography

A noise-robust extension of iterative phase retrieval algorithms that does not need to assume a noise model is proposed. It works by adapting the intensity constraints using the reconstructed object. Using a proof-of-principle ptychographic experiment with visible light and a spatial light modulator to create an object, the proposed method is...

Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

A novel non-iterative phase retrieval method is proposed and demonstrated with a<br/>proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive...

Non-iterative phase retrieval by phase modulation through a single parameter

We report on a novel non-iterative phase retrieval method with which the complex-valued transmission function of an object can be retrieved with a non-iterative computation, with a limited number of intensity measurements. The measurements are taken in either real space or Fourier space, and for each measurement the phase in its dual space is...

Combining ptychographical algorithms with the Hybrid Input-Output (HIO) algorithm

In this article we combine the well-known Ptychographical Iterative Engine (PIE) with the Hybrid Input-Output (HIO) algorithm. The important insight is that the HIO feedback function should be kept strictly separate from the reconstructed object, which is done by introducing a separate feedback function per probe position. We have also...

Performance analysis of coherent optical scatterometry

Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength...