Searched for: contributor%3A%22Sarro%2C+P.M.+%28promotor%29%22
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Poelma, R.H. (author)
This thesis describes a series of experiments and fabrication methods on high-aspect-ratio 3D microstructures for wafer level packaging and 3D heterogeneous system integration (3D-HSI) using novel materials such as carbon nanotubes and thick-film photo-resists. Furthermore, theoretical and experimental research efforts are made to understand the...
doctoral thesis 2016
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Morana, B. (author)
doctoral thesis 2015
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Fiorentino, G. (author)
The realization of efficient passive devices directly on chip represents one of the most intriguing challenges in IC fabrication processes. The performance of such devices are intrinsically determined by physical parameters that cannot be easily scaled, making the on-chip integration of such components a complex task to solve. To pursue the...
doctoral thesis 2015
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Mohammadi, V. (author)
In this thesis, conventional high temperature (HT, 700 °C) PureB technology is optimized in order to fabricate detectors with improved key parameters such as the spatial uniformity of the responsivity. A novel technology for low temperature (LT, 400 °C) boron deposition is developed providing a uniform, smooth, closed LT boron layer. This...
doctoral thesis 2015
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Tran, A.T. (author)
Aluminum Nitride (AlN) is explored as a thin film material for piezoelectric MEMS applications. A pulse DC reactive sputtering technique is used to deposit the AlN thin films and process parameters are optimized to obtain good crystallinity and high c-axis orientation films. A CMOS compatible process is developed and employed to fabricate...
doctoral thesis 2014
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Moh, T.S.Y. (author)
In biosensing, nano-devices such as Silicon Nanowire Field Effect Transistors (SiNW FETs) are promising components/sensors for ultra-high sensitive detection, especially when samples are low in concentration or a limited volume is available. Current processing of SiNW FETs often relies on expensive and time-consuming nanolithography such as E...
doctoral thesis 2013
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Iervolino, E. (author)
TGA is employed to determine degradation temperatures, absorbed moisture content, level of inorganic and organic components in milligram amount of materials. When such amounts of sample material are too dangerous to handle or not available MEMS TGA devices are a valuable option. To realize a MEMS TGA device a number of challenges arise: the...
doctoral thesis 2012
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Santagata, F. (author)
Many Micro-Electro-Mechanical-Systems (MEMS) require encapsulation, to prevent delicate sensor structures being exposed to external perturbations such as dust, humidity, touching, and gas pressure. An upcoming and cost-effective way of encapsulation is zero-level packaging or thin-film encapsulation. With this method, MEMS are already sealed...
doctoral thesis 2011
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Shen, C. (author)
In this thesis we described a new approach to design, fabricate, package and test three silicon based porous vertical structures for nanoparticle separations. These vertical structures stand in between two microfluidic channels. In these walls nano channels that connect the two adjacent microchannels are embedded. Fluid and small particles can...
doctoral thesis 2011
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Mihailovic, M. (author)
This thesis explores the employment of monocrystalline silicon in microsystems as an active material for different thermal functions, such as heat generation and heat transfer by conduction. In chapter 1 applications that need thermal micro devices, micro heaters and micro heat exchangers, are briefly introduced. The shortcomings of commonly...
doctoral thesis 2011
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Sosin, S. (author)
Flexible systems can be found in many fields such as automotive electronics, computers and peripherals (hard drives, image scanners, ink-jet print-head cables), aerospace, consumer electronics (mobile phones, cameras etc), medical (hearing aids, pacemakers) and many others. Further reduction in size and new properties such as reversible...
doctoral thesis 2011
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Wei, J. (author)
High-precision manipulation of small-size objects is an attractive and challenging topic for both industrial production and fundamental scientific research. The capability of monitoring micro-samples during handling is essential to the accuracy and efficiency of a handling system for both liquid and solid samples. When handling liquid samples...
doctoral thesis 2010
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Paalvast, S.L. (author)
The primary goal of this research was to study the feasibility of a thermal micro actuator for improved tracking performance of a Hard Disk Drive (HDD), and the feasibility of thermal actuation for precision micro motion and positioning in general. The fast dynamics of the micro actuator allows it to quickly correct position errors and thus...
doctoral thesis 2010
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Piciu, O.M. (author)
doctoral thesis 2009
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Henneken, V.A. (author)
In this project, the technical feasibility of a novel assembly concept was explored, in which microsystem-based self-assembly functionality is added to an existing product. The case considered is the accurate alignment of an optical fibre relative to a telecommunication laser source. In the most demanding cases this requires alignment accuracies...
doctoral thesis 2008
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Lau, G.K. (author)
Polymers can be used to constitute "artificial muscles" that actuate under an electric stimulus. These polymers include dielectric elastomers and thermally expandable polymers. They are insulating and relatively compliant. Their electric activation is enabled with integration of electrodes, heat conductors or heaters. However, the electrodes or...
doctoral thesis 2007
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Chu Duc, T. (author)
doctoral thesis 2007
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Pham, H.T.M. (author)
doctoral thesis 2004
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Pham, P.N. (author)
doctoral thesis 2003
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