- document
-
de Laat, M.L.C. (author), Perez Garza, H.H. (author), Herder, J.L. (author), Ghatkesar, M.K. (author)In situ stiffness adjustment in microelectromechanical systems is used in a variety of applications such as radio-frequency mechanical filters, energy harvesters, atomic force microscopy, vibration detection sensors. In this review we provide designers with an overview of existing stiffness adjustment methods, their working principle, and...journal article 2016
- document
-
Wörhoff, Kerstin (author), Prak, Albert (author), Postma, F. (author), Leinse, A (author), Wu, K. (author), Peters, T.J. (author), Tichem, M. (author), Amaning-Appiah, B. (author), Renukappa, V. (author), Vollrath, G. (author), Balcells-Ventura, J. (author), Uhlig, P. (author), Seyfried, M. (author), Rose, D. (author), Santos, Raquel (author), Leijtens, XJM (author), Flintham, B. (author), Wale, M. (author), Robbins, D. (author)Fully automated, high precision, cost-effective assembly technology for photonic packages remains one of the main challenges in photonic component manufacturing. Next to the cost aspect the most demanding assembly task for multiport photonic integrated circuits (PICs) is the high-precision (±0.1 μm) alignment and fixing required for optical I...conference paper 2016
- document
-
Peters, T.J. (author), Tichem, M. (author)This paper reports on the progress related to a multichannel photonic alignment concept, aiming for sub-micrometer precision in the alignment of the waveguides of two photonic integrated circuits (PICs). The concept consists of two steps: chip-to-chip positioning and chip bonding provide a coarse alignment after which waveguide-to-waveguide...conference paper 2016
- document
-
Wu, K. (author), Peters, T.J. (author), Tichem, M. (author), Postma, Ferry (author), Prak, Albert (author), Wörhoff, Kerstin (author), Leinse, Arne (author)This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO<sup>2</sup>. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended...conference paper 2016
- document
-
Van Spengen, W.M. (author)In this paper a model is presented that describes the distribution of adhesion values typically experimentally observed for different MEMS devices that have been fabricated in the same way. This spread is attributed to the fact that different devices differ in the details of their surface roughness, even if these surface roughnesses are modeled...journal article 2015
- document
-
Buja, F. (author)This thesis aims to provide the latest progresses on the experimental investigation of friction and adhesion phenomena, occurring at the nanoscale in microelectromechanical systems (MEMS). I have studied and characterized the interaction between MEMS sidewalls in contact and sliding one onto another. Ultrananocrystalline diamond (UNCD) and...doctoral thesis 2015
- document
-
Jiang, J. (author), Chang, Z.Y. (author), Pertijs, M.A.P. (author)This paper presents an energy-efficient readout circuit for micro-machined resonant sensors. It operates by briefly exciting the sensor at a frequency close to its resonance frequency, after which resonance frequency and quality factor are determined from a single ring-down transient. The circuit employs an inverter-based trans-impedance...journal article 2015
- document
-
Peters, T.J. (author), Tichem, M. (author)This paper proposes a microfabrication process for the reliable release of SiO2 beam structures. These structures are intended to be utilized in SiO2 photonic MEMS. A major fabrication challenge is the release of thick (>10 ?m) SiO2 structures with high yield. A single mask process is developed based on temporary reinforcement of the SiO2...journal article 2015
- document
-
de Graaf, G. (author), Abarca Prouza, A.N. (author), Wolffenbuttel, R.F. (author)Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the flow dependence is based on the on-line flow compensation using two thin-film sensors on membranes in parallel on the same chip that are differentially operated. These are laterally identically, but with a different depth...conference paper 2015
- document
- Morana, B. (author) doctoral thesis 2015
- document
-
Van Leeuwen, R. (author)In this thesis the physics of nanoscale mechanical resonators and oscillators is studied. We discuss two types of resonators. First, a top-down fabricated doubly clamped beam resonator with an integrated piezoelectric actuator is introduced. The second type of resonators are based on layered two-dimensional materials, such as graphene and...doctoral thesis 2015
- document
-
Perez Garza, H.H. (author)Properties of matter at the nano-scale may be very different from the ones observed at the macro-scale. The continuous variation of characteristics with diminishing size results in relevant changes in behavior. Similarly, these changes are caused by the rise of completely new phenomena (i.e. quantum confinement). Nanoscience can offer an...doctoral thesis 2015
- document
-
Zaliasl, S (author), Salvia, JC (author), Hill, GC (author), Chen, L (author), Joo, K (author), Palwai, R (author), Arumugam, N (author), Phadke, M (author), Mukherjee, S (author), Lee, HC (author), Grosjean, C (author), Hagelin, PM (author), Pamarti, S (author), Fiez, TS (author), Makinwa, K.A.A. (author), Partridge, A (author), Menon, V (author)Thisjournal article 2015
- document
-
Ye, H. (author)Solid-State Lighting (SSL), powered by Light-Emitting Diodes (LEDs), is an energy-efficient technology for lighting systems. In contrast to incandescent lights which obtain high efficiency at high temperatures, the highest efficiency of LEDs is reached at low temperatures. The thermal management in LED product is then a key design parameter as...doctoral thesis 2014
- document
-
Kokorian, J. (author), Buja, F. (author), Van Spengen, W.M. (author)In this paper, we present a new method for detecting in-plane displacements in microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy. We use a curve-fitting method that is commonly employed in spectroscopy to find peak positions in a spectrum. We fit a function to the intensity profile of the image of a silicon beam...journal article 2014
- document
-
Gaitas, A. (author)This dissertation aims to advance the current state of cantilevers with integrated metal thermal and deflection sensing elements. Metallic sensing elements enable the use of alternative substrate materials (such as polymers), that tend to exhibit higher compliance properties and are more robust (less brittle) compared to Si or Si3N4 cantilevers....doctoral thesis 2013
- document
-
Tian, J. (author)The current trend in electronic packaging research is to integrate more functions into one package, reduce electrical path parasitic, and increase the heat conduction in order to make the final packaged system smaller, more reliable, more functional and more complete, while keeping the packaging cost low. In this trend, unconventional devices ...doctoral thesis 2013
- document
-
Westra, H.J.R. (author)In this Thesis, nonlinear dynamics and nonlinear interactions are studied from a micromechanical point of view. Single and doubly clamped beams are used as model systems where nonlinearity plays an important role. The nonlinearity also gives rise to rich dynamic behavior with phenomena like bifurcations, stochastic switching and amplitude...doctoral thesis 2012
- document
-
Zaal, J.J.M. (author)The world has seen an unrivaled spread of semiconductor technology into virtually any part of society. The main enablers of this semiconductor rush are the decreasing feature size and the constantly decreasing costs of semiconductors. The decreasing costs of semiconductors in general are caused by the smaller feature size, the higher yield and...doctoral thesis 2012
- document
-
Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...journal article 2012