High-performance wafer-scale transfer-free graphene microphones

A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene...

Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies

Properties of matter at the nano-scale may be very different from the ones observed at the macro-scale. The continuous variation of characteristics with diminishing size results in relevant changes in behavior. Similarly, these changes are caused by the rise of completely new phenomena (i.e. quantum confinement). Nanoscience can offer an...

Tunable coupling of two mechanical resonators by a graphene membrane

Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we...

Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces

In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...