Skip to main content
TudRepo
Research repository
Education Repository
Cultural Heritage
About
·
How to search
·
How to upload
Include full text
Search results
Back
Searched for: subject%3A%22MEMS%22
(1 - 3 of 3)
Document type
Date
List view
Grid view
Print
Email
export CSV
export Excel
Robust Wafer-Level Thin-Film Encapsulation (Packaging) of Microstructures (MEMS) using Low Stress PECVD Silicon Carbide
SOI Digital Accelerometer Based on Pull-in Time Configuration
DRIE and Bonding Assisted Low Cost MEMS Processing of In-plane HAR Inertial Sensors