A Miniaturized Optical Sensor with Integrated Gas Cell

The design, fabrication and characterization of a highly integrated optical gas sensor is presented. The gas cell takes up most of the space in a microspectrometer and is the only component that has so far not been miniaturized. Using the tapered resonator cavity of a linear variable optical filter as a gas cell enables ultimate miniaturization,...

Optical Filter for Providing the Required Illumination to Enable Narrow Band Imaging

This paper presents the design, fabrication and characterization of two Fabry Perot type optical filters (415 nm and 540 nm) for enabling Narrow Band Imaging (NBI) in medical devices (MD). The two-colour illumination should satisfy a highly specific optical design, which is composed of a thin-film optical filter stack of titanium dioxide (TiO2)...

A Lossy Fabry-perot Based Optical Filter for Natural Gas Analysis

A set-up for optical gas composition measurement based on absorption spectroscopy is composed of a white light source, a gas cell and a spectrometer. The Fabry-Perot optical filter is suitable for miniaturization of this system, as it is composed of only two reflectors with a transparent layer in-between. Varying the width of this optical...

IR Microspectrometers based on Linear-Variable Optical Filters

This paper presents the design, fabrication and characterization of Infra-Red (IR) Linear Variable Optical Filter (LVOF)-based micro-spectrometers. Two LVOF microspectrometer designs have been realized: one for operating in the 1400 nm to 2500 nm wavelength range and another between 3000 nm and 5000 nm. The IR LVOFs have been fabricated in an IC...

Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

In this paper the concept of a microspectrometer based on a Linear Variable Optical Filter (LVOF) for operation in the visible spectrum is presented and used in two different designs: the first is for the narrow spectral band between 610 nm and 680 nm, whereas the other is for the wider spectral band between 570 nm and 740 nm. Design...

Design and Fabrication of an Albedo Insensitive Analog Sun Sensor

A sun sensor is usually included in a satellite for optically measuring the position relative to the sun. The accuracy of a conventional sun sensor is affected by reflected sunlight at the nearby earth atmosphere: the albedo radiation. The part of the spectrum at near IR (1.5 ?m) is not included in the albedo radiation, due to the high water...

Spectral measurement using IC-compatible linear variable optical filter

This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist...

CMOS-compatible LVOF-based visible microspectrometer

This paper reports on a CMOS-Compatible Linear Variable Optical Filter (LVOF) visible micro-spectrometer. The CMOS-compatible post process for fabrication of the LVOF has been used for integration of the LVOF with a CMOS chip containing a 128-element photodiode array and readout circuitry. Fabrication of LVOF involves a process for fabrication...

High-resolution microspectrometer with an aberration-correcting planar grating

A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS...