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A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology

Mo, J. (author), LI, J. (author), Zhang, Y. (author), Romijn, J. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Vollebregt, S. (author)

In this work, a highly linear temperature sensor based on a silicon carbide (SiC) p-n diode is presented. Under a constant current biasing, the diode has an excellent linear response to the temperature (from room temperature to 600°C). The best linearity (coefficient of determination ${R}^{{2}}$ = 99.98%) is achieved when the current density...

journal article 2023

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The sensitivity enhancement of TiO₂-based VOCs sensor decorated by gold at room temperature

Shooshtari, M. (author), Vollebregt, S. (author), Vaseghi, Yas (author), Rajati, Mahshid (author), Pahlavan, Saeideh (author)

Detection of hazardous toxic gases for air pollution monitoring and medical diagnosis has attracted the attention of researchers in order to realize sufficiently sensitive gas sensors. In this paper, we fabricated and characterized a Titanium dioxide (TiO2)-based gas sensor enhanced using the gold nanoparticles. Thermal oxidation and sputter...

journal article 2023

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Copper Nanoparticle Sintering Enabled Hermetic Packaging With Fine Sealing Ring for MEMS Application

Hu, D. (author), Shah, M.B. (author), Fan, J. (author), Vollebregt, S. (author), Zhang, Kouchi (author)

Driving by the increased demand for hermetic packaging in the more than Moore (MtM) roadmap, a Cu nanoparticle sintering-enabled hermetic sealing solution was developed with a small-size sealing ring. The developed technology simplifies microfabrication and requires less surface roughness using a sinterable Cu nanoparticle paste. A 50μm size...

journal article 2023

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Optimization of multilayer graphene-based gas sensors by ultraviolet photoactivation

Peña, Álvaro (author), Matatagui, Daniel (author), Ricciardella, F. (author), Sacco, L.N. (author), Vollebregt, S. (author), Otero, Daniel (author), López-Sánchez, Jesús (author), Marín, Pilar (author), Horrillo, Mari Carmen (author)

Nitrogen dioxide (NO₂) is a potential hazard to human health at low concentrations, below one part per million (ppm). NO₂ can be monitored using gas sensors based on multi-layered graphene operating at ambient temperature. However, reliable detection of concentrations on the order of parts per million and lower is...

journal article 2023

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Microfabricated albedo insensitive sun position sensor system in silicon carbide with integrated 3D optics and CMOS electronics

Romijn, J. (author), Vollebregt, S. (author), de Bie, Vincent G. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

The next generation of satellites will need to tackle tomorrow's challenges for communication, navigation and observation. In order to do so, it is expected that the amount of satellites in orbit will keep increasing, form smart constellations and miniaturize individual satellites to make access to space cost effective. To enable this next...

journal article 2023

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Enhancement of Room Temperature Ethanol Sensing by Optimizing the Density of Vertically Aligned Carbon Nanofibers Decorated with Gold Nanoparticles

Shooshtari, M. (author), Sacco, L.N. (author), van Ginkel, H.J. (author), Vollebregt, S. (author), Salehi, Alireza (author)

An ethanol gas sensor based on carbon nanofibers (CNFs) with various densities and nanoparticle functionalization was investigated. The CNFs were grown by means of a Plasma-Enhanced Chemical Vapor Deposition (PECVD), and the synthesis conditions were varied to obtain different number of fibers per unit area. The devices with a larger density of...

journal article 2022

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ZnO Nanoparticle Printing for UV Sensor Fabrication

van Ginkel, H.J. (author), Orvietani, M. (author), Romijn, J. (author), Zhang, Kouchi (author), Vollebregt, S. (author)

In this work, a novel microfabrication-compatible production process is demonstrated and used to fabricate UV photoresistors made from ZnO nanoparticles. It comprises a simple room-temperature production method for synthesizing and direct-writing nanoparticles. The method can be used on a wide range of surfaces and print a wide range of...

conference paper 2022

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Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

Sacco, L.N. (author), Meng, Hanxing (author), Vollebregt, S. (author)

This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device...

conference paper 2022

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Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Romijn, J. (author), Vollebregt, S. (author), May, Alexander (author), Erlbacher, Tobias (author), van Zeijl, H.W. (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of...

conference paper 2022

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Angle Sensitive Optical Sensor for Light Source Tracker Miniaturization

Romijn, J. (author), Sanseven, Seçil (author), Zhang, Kouchi (author), Vollebregt, S. (author), Sarro, Pasqualina M (author)

An angle sensitive optical sensor without conventional optics is presented in this article. The reported device omits the need for adding 3-D optics in postprocessing by monolithic integration of complimentary metal-oxide semiconductor compatible diffraction grating layers, which cuts down the fabrication costs and allows for miniaturization...

journal article 2022

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Effect of temperature and humidity on the sensing performance of TiO₂nanowire-based ethanol vapor sensors

Shooshtari, M. (author), Salehi, Alireza (author), Vollebregt, S. (author)

In this paper, we study the influence of two key factors, temperature, and humidity, on gas sensors based on titanium dioxide nanowires synthesized at 4 different temperatures and with different morphology. The samples' structure are investigated using SEM, XRD and FTIR analysis. The effects of humidity and temperature are studied by...

journal article 2021

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Monolithic integration of a smart temperature sensor on a modular silicon-based organ-on-a-chip device

Martins Da Ponte, R. (author), Gaio, N. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Dijkstra, Paul (author), Dekker, R. (author), Serdijn, W.A. (author), Giagka, Vasiliki (author)

One of the many applications of organ-on-a-chip (OOC) technology is the study of biological processes in human induced pluripotent stem cells (iPSCs) during pharmacological drug screening. It is of paramount importance to construct OOCs equipped with highly compact in situ sensors that can accurately monitor, in real time, the extracellular...

journal article 2021

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Room temperature ppt-level NO₂ gas sensor based on SnO _x/SnS nanostructures with rich oxygen vacancies

Tang, H. (author), Gao, Chenshan (author), Yang, Huiru (author), Sacco, L.N. (author), Sokolovskij, R. (author), Ye, H. (author), Vollebregt, S. (author), Fan, X. (author), Zhang, Kouchi (author)

In this paper, tin oxidation (SnO x )/tin-sulfide (SnS) heterostructures are synthesized by the post-oxidation of liquid-phase exfoliated SnS nanosheets in air. We comparatively analyzed the NO2 gas response of samples with different oxidation levels to study the gas sensing mechanisms. The results show that the samples oxidized at 325 °C are...

journal article 2021

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Multi-layer graphene Pirani pressure sensors

Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)

The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...

journal article 2021

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Resistive and CTAT Temperature Sensors in a Silicon Carbide CMOS Technology

Romijn, J. (author), Middelburg, L.M. (author), Vollebregt, S. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

Accurately sensing the temperature in silicon carbide (power) devices is of great importance to their reliable operation. Here, temperature sensors by resistive and CMOS structures are fabricated and characterized in an open silicon carbide CMOS technology. Over a range of 25-200°C, doped design layers have negative temperature coefficients of...

conference paper 2021

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Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control

Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author), Leijtens, Johan (author), Sarro, Pasqualina M (author)

In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with...

conference paper 2021

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Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)

The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...

journal article 2021

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Functionalisation of Multi-Layer Graphene-Based Gas Sensor by Au Nanoparticles

Morelli, L. (author), Ricciardella, F. (author), Koole, Max (author), Persijn, Stefan (author), Vollebregt, S. (author)

A novel gas sensor based on multi-layered graphene (MLG) functionalised with gold nanoparticles (Au-NPs) is presented. We demonstrate for the first time that: (1) the signal saturates during the analyte exposure, something which does not occur in the pristine material and in graphene-based gas sensors in general; (2) the sign of the device...

conference paper 2020

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3D-impaction printing of porous layers

van Ginkel, H.J. (author), Roels, P. (author), Boeije, M.F.J. (author), Pfeiffer, T.V. (author), Vollebregt, S. (author), Zhang, Kouchi (author), Schmidt-Ott, A. (author)

Porous layers composed of nanoparticles (NPs) have a wide range of (potential) applications including catalysts, (chemical) sensors, thermoelectric materials and electronics. These application domains will profit strongly from our NP printing process which is flexible with respect to i) the composition of the NPs and ii) the possibility of...

abstract 2020

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Low-humidity sensing properties of multi-layered graphene grown by chemical vapor deposition

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Sarro, Pasqualina M (author), Duesberg, Georg S. (author)

Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of...

journal article 2020