Silicon Micromachining for RF Technology

Integrated micro vacuum tubes in silicon, The Return of the "Radio Valve"

A Buried Vertical Filter for Micro and Nanoparticle Filtration

This paper presents a silicon micromachined filter for micro- and nanoparticles. The filter is vertical and completely buried beneath the surface. The buried aspect allows additional features to be integrated above the filter, while the vertical aspect allows the creation of highly uniform pores and efficient use of die area. The filter is...