6 records found
1
Optimum dose for shot noise limited CD uniformity in E-beam lithography
Design report maskless system, rapport aan Mapper Lithography B.V.
Overview of MAPPER system concept
System optimization model description, rapport aan Mapper Lithography B.V.
Failure analysis of an eletrical drive system with a transverse flux machine (TFM)
Design of the electron optical part of the mapper machine.
