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WFA Besling
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2 records found
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
Journal article -
R Li
,
Y Lamy
,
WFA Besling
,
F Roozeboom
,
Pasqualina M Sarro
Fluidized-bed atomic layer deposition reactor for the synthesis of core-shell nanoparticles
Journal article -
A.P. Didden
,
J. Middelkoop
,
WFA Besling
,
D. Nanu
,
R. van de Krol