With the increasing requirements of the semiconductor industry, ASML lithographic machines, essential for chip manufacturing, are becoming more complex. Consequently, the mains distribution system, a crucial part of these machines, is increasingly vulnerable to short circuit (SC) faults due to the growing number of system components. SC assessment of this system in compliance with international standards is vital as they are utilized by companies worldwide.

This thesis provides a standardized assessment method for industrial mains distribution system that complies with international standards. The assessment method includes the determination of available SC current and overall short circuit current rating (SCCR) and is implemented as a Matlab tool. Additionally, this thesis explores ways to increase the SCCR of the system by improving protection and limiting current considering current-limiting alternating current circuit breakers and various direct current circuit breaker (DCCB) technologies, including fault current limiters. Finally, the assessment results are validated through the physical testing results of a branch circuit within the ASML mains distribution system.