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Journal article (1)

1 records found

1

Hydrogen SilsesQuioxane, a high-resolution negative tone e-beam resist, investigated for its applicability in photon-based lithographics

Journal article (2002) - M Peuker (author) , MH Lim (author) , HI Smith (author) , R Morton (author) , Anja Suurling (author) , J Romijn (author) , E.W.J.M. van der Drift (author) , FCMJM van Delft (author)