Single junction solar cells have a theoretical efficiency limit of 33.1% due to spectral mismatch. To overcome this, multi-junction devices are generally fabricated with two or more junctions, so as to achieve better energy conversion efficiency by optimum spectral utilization. The c-Si bottom cell of a thin-film Si triple-/quadruple-junction device does not utilize the low energy photons (below 1.1 eV). The photons in the range of 0.7-1.1 eV, have an available current density of 15.9 mA/cm^2. A fraction of this current density would be large enough to not limit the output current of these thin-film Si-based multi-junction devices. Ge, belonging to the same group IV as Si and being heavier than it, forms weaker covalent bonds. Hence, it has a lower bandgap energy, making it the preferred choice of material. In this work, a low bandgap material such as a Ge-based absorber layer is fabricated that can be used in the bottom cell of a thin-film Si-based quadruple-junction device. This thesis will focus on the influence of a set of deposition parameters on the various properties of the Ge:H films. This will result in a set of Ge:H films from which a specific few are used as absorber layers to analyze the performance of a single-junction cell. The fabrication of the Ge:H films is carried out on a CASCADE setup which is based on the RF-PECVD technique. A processing range is identified to be in the range of 1-5 mbar pressure with RF powers ranging between 5-25 W for a fixed electrode distance of 20mm. nc-Ge:H are processed in the range of 20-25 W for pressures of 2 mbar and higher at a high dilution of 400. A strong correlation is found between the refractive index of the films and the presence of GeOx. The films with low refractive index possibly indicate a porous network with high void density show substantial oxygen contamination and vice-versa. Water vapour in the ambient is responsible for the oxidation. The oxygen contamination significantly impacts the properties of the films. The E04 optical bandgap increases with oxygen contamination which hinders the development of a low-bandgap absorber layer, while the Eact decreases to values as low as around 50 eV . Generally, the pre-exponential factor (sigma_o) decreases significantly by 1-5 orders of magnitude which outweighs the decrease in Eact, resulting in the decrease in dark conductivity by 1-3 orders of magnitude. Consequently, highest photo/dark conductivity ratios of 5-6 are obtained for these films. Amongst the films without oxygen contamination, the lowest E04 optical bandgap reported is 1.2 eV, with a Etauc bandgap of 0.93 and a photo/dark conductivity ratio around 3.4. Most of the single-junction cells processed at absorber layer thicknesses of 100nm and above show resistor-like behaviour. The substantially high values of Rs losses associated to the Rsh degrade the cell parameters significantly. Although, for low absorber layer thickness of around 50nm, the closest resemblance to a cell-behaviour is observed. Therefore, there is a scope for improvement with regards to processing of these single-junction cells.