Microscopy with extreme ultraviolet (EUV) radiation enables high-resolution imaging with excellent material contrast because of the short wavelength and numerous element-specific absorption edges available in this spectral range. Table-top high-harmonic generation (HHG) sources offer the additional advantage of generating wide spectra in the EUV and soft X-ray range, making them inherently well-suited for characterizing nanostructures. As lens-based EUV imaging is challenging, lensless imaging methods based on coherent diffraction offer practical advantages and can even allow for quantitative phase measurements of object transmission functions. Here, spectrally resolved lensless imaging of a dispersive sample is performed using multiple high harmonics based on different HHG-based measurement concepts. We characterize the structure and composition of a three-element spiral-shaped object in transmission using multiwavelength diffractive shearing interferometry, as well as single-wavelength structured-illumination ptychography. We find that both methods are capable of retrieving spatially resolved element maps and the corresponding layer thicknesses. Comparing methods, ptychography provides superior accuracy in determining layer thickness, even for stacks of multiple materials, using an extended scattering quotient. These measurement and analysis concepts thus provide a nondestructive way to accurately extract information on the material composition and layer thicknesses of complex nanostructured samples.

Photoconductive antennas have been used extensively for THz radiation the last few years. In this thesis, we propose a photoconductive connected dipole array consisting of 36x36 elements that is used as a feed in a THz silicon lens and radiates in a band ranging from 100 GHz to 5 THz. Specifically, we compute theoretically the radiated field patterns of the array as well as the secondary field beyond the lens. Furthermore, we investigate the feasibility of the fabrication of such a photoconductive connected array, given the challenges in 3D printing of a um-sized microlens array that is used to focus the laser power to the excitation gaps of the dipoles. We conclude that microlenses of sufficient accuracy can be fabricated in the premises of TU Delft without compromising the efficiency expected in theory. Lastly, we build a Matlab GUI that computes the far field radiated by various types and sizes of lens antennas in transmission, provided that the field radiated by the feed is already known. This tool has been successfully validated and supported the work in the first part of the thesis at the calculation of the far field of our proposed THz silicon lens antenna.