This work presents a cryo-CMOS smart temperature sensor operating from room temperature down to 5 K. By adopting sensing elements (CMOS bulk diodes, pMOS/DTMOS in weak inversion) that circumvent the poor cryogenic performance of Si BJTs, a robust switched-capacitor second-order sigma–delta readout and cryogenic-aware design techniques, the sensor achieves a maximum error of ±0.73 K (four samples and two-point trim), a resolution below 0.05 K for a 102.4-ms readout duration, and a power consumption of 15.5 µW 93.5 µW) at 5 K (296 K).