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A Cryo-CMOS Smart Temperature Sensor for the Ultrawide Temperature Range From 5 K to 296 K

Journal Article (2026)
Author(s)

Cerviño C. Fungueiriño (TU Delft - QuTech Advanced Research Centre, TU Delft - QCD/Sebastiano Lab)

L. A. Enthoven (TU Delft - QCD/Sebastiano Lab, TU Delft - QuTech Advanced Research Centre, TU Delft - Business Development)

J. van Staveren (TU Delft - QCD/Sebastiano Lab, TU Delft - QuTech Advanced Research Centre)

M. Babaie (TU Delft - QCD/Babaie Lab, TU Delft - Electronics, TU Delft - QuTech Advanced Research Centre)

F. Sebastiano (TU Delft - QuTech Advanced Research Centre, TU Delft - Quantum Circuit Architectures and Technology, TU Delft - QCD/Sebastiano Lab)

DOI related publication
https://doi.org/10.1109/LSSC.2025.3650657 Final published version
More Info
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Publication Year
2026
Language
English
Journal title
IEEE Solid-State Circuits Letters
Volume number
9
Pages (from-to)
29-32
Downloads counter
67
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Abstract

This work presents a cryo-CMOS smart temperature sensor operating from room temperature down to 5 K. By adopting sensing elements (CMOS bulk diodes, pMOS/DTMOS in weak inversion) that circumvent the poor cryogenic performance of Si BJTs, a robust switched-capacitor second-order sigma–delta readout and cryogenic-aware design techniques, the sensor achieves a maximum error of ±0.73 K (four samples and two-point trim), a resolution below 0.05 K for a 102.4-ms readout duration, and a power consumption of 15.5 µW 93.5 µW) at 5 K (296 K).