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Max van Haren

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23 records found

Conference paper (2026) - Deokjin Lee, Max Haren, J. Kon, T. Oomen, S. Oh
This paper presents a novel dynamics-aware iterative learning control (DAILC) for linear parameter-varying (LPV) robotic systems performing dynamic, non-repetitive tasks. While conventional basis function iterative learning control (BFILC) offers advantages for high precision control in non-repetitive operations, its performance degrades in the presence of dynamic variations. To overcome this limitation, the proposed method embeds physically consistent basis functions derived from LPV multi-body dynamics, enabling enhanced robustness to system variations and inherent nonlinearities while maintaining task flexibility. The effectiveness of the DAILC approach is validated through simulations on an LPV robotic manipulator, demonstrating superior tracking performance and disturbance tolerance compared with existing state-of-the-art control strategies. ...

A direct frequency-domain identification approach

Journal article (2025) - Max van Haren, Lennart Blanken, Tom Oomen
Frequency-domain performance analysis of intersample behavior in sampled-data and multirate systems is challenging due to the lack of a frequency-separation principle, and systematic identification techniques are lacking. The aim of this paper is to develop an efficient technique for identifying the full intersample performance in the frequency-domain for closed-loop multirate systems, in particular the Performance Frequency Gain (PFG). Through local modeling techniques, aliased frequency components are effectively disentangled when identifying the PFG, which is directly facilitated by frequency-lifting the multirate system to a multivariable time-invariant representation. The developed method accurately and directly identifies the PFG in a single identification experiment. Finally, the developed method is experimentally validated on a prototype motion system, showing accurate identification of frequency-domain representations for the multirate system, including the PFG. ...
Conference paper (2025) - Rodrigo A. González, Max van Haren, T.A.E. Oomen, Cristian R. Rojas

A Sparsity-Promoting Approach Applied to an Industrial Printer

Conference paper (2025) - Tjeerd Ickenroth, Max Van Haren, Johan Kon, Max Van Meer, Jilles Van Hulst, Tom Oomen
Iterative learning control (ILC) techniques are capable of improving the tracking performance of control systems that repeatedly perform similar tasks by utilizing data from past iterations. The aim of this paper is to design a systematic approach for learning parameterized feedforward signals with limited complexity. The developed method involves an iterative learning control in conjunction with a data-driven sparse subset selection procedure for basis function selection. The ILC algorithm that employs sparse optimization is able to automatically select relevant basis functions and is validated on an industrial flatbed printer. ...
Conference paper (2025) - Tjeerd Ickenroth, Max van Haren, Johan Kon, Jilles Van Hulst, Max van Meer, T.A.E. Oomen
Journal article (2025) - Max van Haren, Lennart Blanken, Koen Classens, Tom Oomen
Fast-rate models are essential for control design, specifically to address intersample behavior. The aim of this article is to develop a frequency-domain nonparametric identification technique to estimate fast-rate models of systems that have relevant dynamics and allow for actuation above the Nyquist frequency of a slow-rate output. Examples of such systems include vision-in-the-loop systems. Through local rational models over multiple frequency bands, aliased components are effectively disentangled, particularly for lightly damped systems. The developed technique accurately determines nonparametric fast-rate models of systems with slow-rate outputs, all within a single identification experiment. Finally, the effectiveness of the technique is demonstrated through experiments conducted on a prototype wafer stage used for semiconductor manufacturing. ...

A kernel-based learning approach

Journal article (2025) - Max van Haren, Lennart Blanken, Tom Oomen
The increasing demands for high accuracy in mechatronic systems necessitate the incorporation of parameter variations in feedforward control. The aim of this paper is to develop a data-driven approach for direct learning of parameter-varying feedforward control to increase tracking performance. The developed approach is based on kernel-regularized function estimation in conjunction with iterative learning to directly learn parameter-varying feedforward control from data. This approach enables high tracking performance for feedforward control of linear parameter-varying dynamics, providing flexibility to varying reference tasks. The developed framework is validated on a benchmark industrial experimental setup featuring a belt-driven carriage. ...
Journal article (2025) - Max van Haren, Masahiro Mae, Lennart Blanken, Tom Oomen
Frequency-domain representations are crucial for the design and performance evaluation of controllers in multirate systems, specifically to address intersample performance. The aim of this paper is to develop an effective frequency-domain system identification technique for closed-loop multirate systems using solely slow-rate output measurements. By indirect identification of multivariable time-invariant representations through lifting, in combination with local modeling techniques, the multirate system is effectively identified. The developed method is capable of accurate identification of closed-loop multirate systems within a single identification experiment, using fast-rate excitation and inputs, and slow-rate outputs. Finally, the developed framework is validated using a benchmark problem consisting of a multivariable dual-stage actuator from a hard disk drive, demonstrating its applicability and accuracy. ...
Journal article (2025) - Max van Haren, Roy S. Smith, Tom Oomen
Models that contain intersample behavior are important for control design of systems with slow-rate outputs. The aim of this paper is to develop a system identification technique for fast-rate models of systems where only slow-rate output measurements are available, e.g., vision-in-the-loop systems. In this paper, the intersample response is estimated by identifying fast-rate models through least-squares criteria, and the limitations of these models are determined. In addition, a method is developed that surpasses these limitations and is capable of estimating unique fast-rate models of arbitrary order by regularizing the least-squares estimate. The developed method utilizes fast-rate inputs and slow-rate output measurements and identifies fast-rate models accurately in a single identification experiment. Finally, both simulation and experimental validation on a prototype wafer stage demonstrate the effectiveness of the framework. ...
Journal article (2025) - Masahiro Mae, Max van Haren, Koen Classens, Wataru Ohnishi, Tom Oomen, Hiroshi Fujimoto
Increasing performance requirements in high-precision mechatronic systems lead to a situation where both multivariable and sampled-data implementation aspects need to be addressed. The aim of this paper is to develop a design framework for a multi-input multi-output feedforward controller to improve continuous-time tracking performance through learning. The sampled-data feedforward controller is designed with physically interpretable tuning parameters using a multirate zero-order-hold differentiator. The developed approach enables interaction compensation for multi-input multi-output systems and the feedforward controller parameters are updated through learning. The performance improvement is experimentally validated in a multi-input multi-output motion system compared to the conventional feedforward controllers. ...
Conference paper (2024) - Kentaro Tsurumoto, Wataru Ohnishi, Takafumi Koseki, Max Van Haren, Tom Oomen
Iterative learning control (ILC) yields substantial performance improvement for repetitive motion tasks. While task-flexibility for non-repetitive motion tasks can be achieved with the use of basis functions, this typically comes with a trade-off in performance or design parameters. This study aims to achieve both task-flexibility and high performance with a single time-domain optimization framework. By defining a criterion combining the cost for performance and task-flexibility, an optimal feedforward with task-flexibility of basis function ILC and high performance surpassing standard norm-optimal ILC is obtained. Numerical validation on a two-mass motion system confirm the capabilities of the developed framework. ...
Journal article (2024) - Kentaro Tsurumoto, Wataru Ohnishi, Takafumi Koseki, Max Van Haren, Tom Oomen
Iterative learning control yields accurate feedforward input by utilizing experimental data from past iterations. However, typically there exists a tradeoff between task flexibility and tracking performance. This study aims to develop a learning framework with both high task-flexibility and high tracking-performance by integrating rational basis functions with frequency-domain learning. Rational basis functions enable the learning of system zeros, enhancing system representation compared to polynomial basis functions. The developed framework is validated through a two-mass motion system, showing high tracking-performance with high task-flexibility, enhanced by the rational basis functions effectively learning the flexible dynamics. ...

Aliasing, Input Conditions, and Consistency

Journal article (2024) - Rodrigo A. Gonzalez, Max Van Haren, Tom Oomen, Cristian R. Rojas
The sampling rate of input and output signals is known to play a critical role in the identification and control of dynamical systems. For slow-sampled continuous-time systems that do not satisfy the Nyquist-Shannon sampling condition for perfect signal reconstructability, careful consideration is required when identifying parametric and nonparametric models. In this letter, a comprehensive statistical analysis of estimators under slow sampling is performed. Necessary and sufficient conditions are obtained for unbiased estimates of the frequency response function beyond the Nyquist frequency, and it is shown that consistency of parametric estimators can be achieved even if input frequencies overlap after aliasing. Monte Carlo simulations confirm the theoretical properties. ...
Journal article (2024) - Max van Haren, Kentaro Tsurumoto, Masahiro Mae, Lennart Blanken, Wataru Ohnishi, Tom Oomen
Iterative learning control (ILC) techniques are capable of improving the tracking performance of control systems that repeatedly perform similar tasks by utilizing data from past iterations. The aim of this paper is to achieve both the task flexibility enabled by ILC with basis functions and the performance of frequency-domain ILC, with an intuitive design procedure. The cost function of norm-optimal ILC is determined that recovers frequency-domain ILC, and consequently, the feedforward signal is parameterized in terms of basis functions and frequency-domain ILC. The resulting method has the performance and design procedure of frequency-domain ILC and the task flexibility of basis functions ILC, and are complimentary to each other. Validation on a benchmark example confirms the capabilities of the framework. ...

Applied to Snap and Force Ripple in Semiconductor Equipment

Journal article (2024) - Maurice Poot, Max Van Haren, Dragan Kostic, Jim Portegies, Tom Oomen
The requirements for high accuracy and throughput in next-generation data-intensive motion systems lead to situations where position-dependent feedforward is essential. This article aims to develop a framework for interpretable and task-flexible position-dependent feedforward through systematic learning with automated experimental design. A data-driven and interpretable framework is developed by employing Gaussian process (GP) regression, enabling accurate modeling of feedforward parameters as a continuous function of position. The data is efficiently collected and illustrated through an iterative learning control (ILC) algorithm. Moreover, a framework for experimental design in the sense of automatically determining the training positions is presented by exploiting the uncertainty estimates of the GP and the specified first-principles knowledge. Two relevant case studies show the importance and significant performance improvement of the approach for position-dependent snap feedforward for a simplified 1-D wafer stage simulation and experimental application to position-dependent motor force constant compensation in an industrial wirebonder. ...
Journal article (2023) - Max Van Haren, Leonid Mirkin, Lennart Blanken, Tom Oomen
Fast-sampled models are essential for control design, e.g., to address intersample behavior. The aim of this letter is to develop a non-parametric identification technique for fast-sampled models of systems that have relevant dynamics and actuation above the Nyquist frequency of the sensor, such as vision-in-the-loop systems. The developed method assumes smoothness of the frequency response function, which allows to disentangle aliased components through local models over multiple frequency bands. The method identifies fast-sampled models of slowly-sampled systems accurately in a single identification experiment. Finally, an experimental example demonstrates the effectiveness of the technique. ...
Conference paper (2022) - Masahiro Mae, Max van Haren, Wataru Ohnishi, T.A.E. Oomen, Hiroshi Fujimoto
Feedforward control has an important role in high-precision mechatronic systems. The aim of this research is to design a discrete-time feedforward controller to improve on-sample and intersample errors. The developed approach is parameterized using a linear combination of parameters and basis functions, which results in a parameterization that has intuitive physical meaning. The basis functions are designed with a differentiator that considers the sampled-data and zero-order-hold aspects. The performance improvement is demonstrated by comparing the developed approach with a conventional basis function design for a motion system. ...
Journal article (2022) - Maurice Poot, Jim Portegies, Noud Mooren, Max van Haren, Max van Meer, Tom Oomen
Machine learning techniques, including Gaussian processes (GPs), are expected to play a significant role in meeting speed, accuracy, and functionality requirements in future data-intensive mechatronic systems. This paper aims to reveal the potential of GPs for motion control applications. Successful applications of GPs for feedforward and learning control, including the identification and learning for noncausal feedforward, position-dependent snap feedforward, nonlinear feedforward, and GP-based spatial repetitive control, are outlined. Experimental results on various systems, including a desktop printer, wirebonder, and substrate carrier, confirmed that data-based learning using GPs can significantly improve the accuracy of mechatronic systems. ...
Conference paper (2022) - Max van Haren, Maurice Poot, Dragan Kostic, Robin van Es, Jim Portegies, T.A.E. Oomen
Mechatronic systems have increasingly stringent performance requirements for motion control, leading to a situation where many factors, such as position-dependency, cannot be neglected in feedforward control. The aim of this paper is to compensate for position-dependent effects by modeling feedforward parameters as a function of position. A framework to model and identify feedforward parameters as a continuous function of position is developed by combining Gaussian processes and feedforward parameter learning techniques. The framework results in a fully data-driven approach, which can be readily implemented for industrial control applications. The framework is experimentally validated and shows a significant performance increase on a commercial wire bonder. ...
Conference paper (2022) - Maurice Poot, Jim Portegies, Noud Mooren, Max van Haren, Max van Meer, T.A.E. Oomen
Machine learning techniques, including Gaussian processes (GPs), are expected to play a significant role in meeting speed, accuracy, and functionality requirements in future data-intensive mechatronic systems. This paper aims to reveal the potential of GPs for motion control applications. Successful applications of GPs for feedforward and learning control, including the identification and learning for noncausal feedforward, position-dependent snap feedforward, nonlinear feedforward, and GP-based spatial repetitive control, are outlined. Experimental results on various systems, including a desktop printer, wirebonder, and substrate carrier, confirmed that data-based learning using GPs can significantly improve the accuracy of mechatronic systems. ...