Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Journal Article
(2004)
Author(s)
A Bourtsev (TU Delft - Electronic Components, Technology and Materials)
H. Schut (TU Delft - Old - Section Defects in Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
A van Veen (TU Delft - Old - Section Defects in Materials)
J Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Old - EWI Sect. ECTM)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:0a72b09a-09b5-4175-ba67-d036cc07e217
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Volume number
114-115
Pages (from-to)
109-113
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