Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

Journal article (2004)

Authors

A Bourtsev Electronic Components, Technology and Materials - EEMCS
H. Schut Old - Section Defects in Materials
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
A van Veen Old - Section Defects in Materials
J Slabbekoorn Electronic Components, Technology and Materials - EEMCS
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials