Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

Journal Article (2004)
Authors

A Bourtsev (TU Delft - Electronic Components, Technology and Materials)

H Schut (Old - Section Defects in Materials)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

A van Veen (Old - Section Defects in Materials)

J Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
109-113

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