Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization
Conference Paper
(2005)
Author(s)
V Rana (TU Delft - Electronic Components, Technology and Materials)
R. Ishihara (TU Delft - Electronic Components, Technology and Materials)
Y Hiroshima (External organisation)
D Abe (External organisation)
S Inoue (External organisation)
T Shimoda (External organisation)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:1bd0dcdf-bd20-4b44-ab78-df2ebbbce586
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
307-310
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