Influences of the capping layer on the grain growth with micro-Czochralski process during excimer-laser crystallization
Journal Article
(2006)
Author(s)
M He (TU Delft - Electronic Components, Technology and Materials)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
Y Hiroshima (External organisation)
S Inoue (External organisation)
T Shimoda (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:3ed0a73a-4ef9-4ca1-8e2b-35feb20870e6
More Info
expand_more
expand_more
Publication Year
2006
Research Group
Electronic Components, Technology and Materials
No files available
Metadata only record. There are no files for this record.