Influences of the capping layer on the grain growth with micro-Czochralski process during excimer-laser crystallization

Journal Article (2006)
Author(s)

M He (TU Delft - Electronic Components, Technology and Materials)

Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)

Y Hiroshima (External organisation)

S Inoue (External organisation)

T Shimoda (External organisation)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials

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