Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias

M Saadaoui (TU Delft - Old - EWI Sect. ECTM)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)

A van Bogaard (TU Delft - Electronic Components, Technology and Materials)

Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)