High-rate deposition of microcrystalline silicon with an expanding thermal plasma

Journal article (2005)

Authors

C Smit Electronic Components, Technology and Materials -

A Klaver Electronic Components, Technology and Materials -

BA Korevaar Electronic Components, Technology and Materials -

AMHN Petit Electronic Components, Technology and Materials -

DL Williamson External organisation

R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials -

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:8a615984-faba-426a-966a-92f57d185c45

Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials