Polyimide sacrificial layer and novel materials for post-processing surface micromachining
Journal Article
(2002)
Author(s)
A Bagolini (TU Delft - Electronic Components, Technology and Materials)
L.S. Pakula (TU Delft - Electronic Instrumentation)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
HTM Pham (TU Delft - Electronic Components, Technology and Materials)
P.J. French (TU Delft - Electronic Instrumentation)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Volume number
12
Pages (from-to)
385-389
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