Microstructure characterisation of location-controlled Si-islands crystallised by excimer laser in the µ-Czochralski (grain filter) process

Conference Paper (2004)
Author(s)

D Danciu (TU Delft - Electronic Components, Technology and Materials)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

F.D. Tichelaar (QN/High Resolution Electron Microscopy)

Y Hiroshima (External organisation)

S Inoue (External organisation)

T Shimoda (External organisation)

JW Metselaar (TU Delft - Electronic Components, Technology and Materials)

Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
145-148

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