Microstructure characterisation of location-controlled Si-islands crystallised by excimer laser in the µ-Czochralski (grain filter) process

Conference paper (2004)

Authors

D Danciu Electronic Components, Technology and Materials - EEMCS
R. Ishihara Electronic Components, Technology and Materials - EEMCS
F.D. Tichelaar QN/High Resolution Electron Microscopy
Y Hiroshima External organisation
S Inoue External organisation
T Shimoda External organisation
JW Metselaar Electronic Components, Technology and Materials - EEMCS
C.I.M. Beenakker Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials