Effects of capping layer on grain growth with ¿-Czochralski process during excimer laser crystallization
Journal Article
(2006)
Author(s)
M He (TU Delft - Electronic Components, Technology and Materials)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
Y Hiroshima (External organisation)
S Inoue (External organisation)
T Shimoda (External organisation)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:a4b1e276-1fd5-43c7-8dfb-782dee13e461
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Issue number
1A, 1
Volume number
45
Pages (from-to)
1-6
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