Planer wafer transport and positioning on an air film using a viscous traction principle
Journal Article
(2009)
Author(s)
J van Rij (TU Delft - Mechatronic Systems Design)
J. Wesselingh (TU Delft - Mechatronic Systems Design)
Ron van Ostayen (TU Delft - Mechatronic Systems Design)
J.W. Spronck (TU Delft - Mechatronic Systems Design)
R.H. Munnig Schmidt (TU Delft - Mechatronic Systems Design)
J. van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:bdac311f-517b-4a31-80b2-9d7f7b915585
More Info
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Publication Year
2009
Research Group
Mechatronic Systems Design
Issue number
03
Volume number
2009
Pages (from-to)
1-8
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