Planer wafer transport and positioning on an air film using a viscous traction principle

Journal article (2009)

Authors

J van Rij Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. Wesselingh Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.A.J. van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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http://resolver.tudelft.nl/uuid:bdac311f-517b-4a31-80b2-9d7f7b915585

Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design