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Jv
J van Rij
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Authored
2 records found
Planar flat product transport using viscous traction
Conference paper -
J van Rij
,
J. Wesselingh
,
R.A.J. van Ostayen
,
J.W. Spronck
,
R.H. Munnig Schmidt
,
J. van Eijk
Planer wafer transport and positioning on an air film using a viscous traction principle
Journal article -
J van Rij
,
J. Wesselingh
,
R.A.J. van Ostayen
,
J.W. Spronck
,
R.H. Munnig Schmidt
,
J. van Eijk